Parylene-C encapsulation for polymeric cantilever stability

Maheshwari, Nidhi; Chatterjee, Gaurav; Vinchurkar, Madhuri; Gupta, Gaurav; Kshirsagar, Hemant; Narsimhan, K. L.; Rao, V. Ramgopal

doi:10.1109/dtip.2015.7161032

Cited by 3 publications

(1 citation statement)

References 21 publications

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“…Unfortunately, SU-8 has been demonstrated to be a good polymer material for humidity sensing due to its hygroscopic nature [ 17 ], so the output of piezoresistive micro-cantilever based on SU-8 is unstable when exposed to liquid phase for an extended period of time. Parylene-C, which has a similar Young’s modulus to SU-8, has been indicated to be an encapsulation and passivation layer for increasing the stability of piezoresistive micro-cantilevers [ 18 ].…”

Section: Introductionmentioning

confidence: 99%

Polymeric Flexible Immunosensor Based on Piezoresistive Micro-Cantilever with PEDOT/PSS Conductive Layer

Zhao

Sun

2018

Sensors

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In this paper, a fully polymeric micro-cantilever with the surface passivation layer of parylene-C and the strain resistor of poly(3,4-ethylenedioxythiophene)/poly (styrene sulfonate) (PEDOT/PSS) was proposed and demonstrated for immunoassays. By optimizing the design and fabrication of the polymeric micro-cantilever, a square resistance of 220 Ω/□ for PEDOT/PSS conductive layer have been obtained. The experimental spring constant and the deflection sensitivity were measured to be 0.017 N/m and 8.59 × 10−7 nm−1, respectively. The biological sensing performances of polymeric micro-cantilever were investigated by the immunoassay for human immunoglobulin G (IgG). The immunosensor was experimentally demonstrated to have a linear behavior for the detection of IgG within the concentrations of 10~100 ng/mL with a limit of detection (LOD) of 10 ng/mL. The experimental results indicate that the proposed polymeric flexible conductive layer-based sensors are capable of detecting trace biological substances.

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Section: Introductionmentioning

confidence: 99%

Polymeric Flexible Immunosensor Based on Piezoresistive Micro-Cantilever with PEDOT/PSS Conductive Layer

Zhao

Sun

2018

Sensors

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A Review on Surface Stress-Based Miniaturized Piezoresistive SU-8 Polymeric Cantilever Sensors

Mathew

Sankar

2018

Nano-Micro Lett.

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In the last decade, microelectromechanical systems (MEMS) SU-8 polymeric cantilevers with piezoresistive readout combined with the advances in molecular recognition techniques have found versatile applications, especially in the field of chemical and biological sensing. Compared to conventional solid-state semiconductor-based piezoresistive cantilever sensors, SU-8 polymeric cantilevers have advantages in terms of better sensitivity along with reduced material and fabrication cost. In recent times, numerous researchers have investigated their potential as a sensing platform due to high performance-to-cost ratio of SU-8 polymer-based cantilever sensors. In this article, we critically review the design, fabrication, and performance aspects of surface stress-based piezoresistive SU-8 polymeric cantilever sensors. The evolution of surface stress-based piezoresistive cantilever sensors from solid-state semiconductor materials to polymers, especially SU-8 polymer, is discussed in detail. Theoretical principles of surface stress generation and their application in cantilever sensing technology are also devised. Variants of SU-8 polymeric cantilevers with different composition of materials in cantilever stacks are explained. Furthermore, the interdependence of the material selection, geometrical design parameters, and fabrication process of piezoresistive SU-8 polymeric cantilever sensors and their cumulative impact on the sensor response are also explained in detail. In addition to the design-, fabrication-, and performance-related factors, this article also describes various challenges in engineering SU-8 polymeric cantilevers as a universal sensing platform such as temperature and moisture vulnerability. This review article would serve as a guideline for researchers to understand specifics and functionality of surface stress-based piezoresistive SU-8 cantilever sensors.

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Determination of Staphylococcus Enterotoxin B Using a Flexible Aptamer-Based Biosensor

Zhao

et al. 2023

IEEE Sensors J.

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Parylene-C encapsulation for polymeric cantilever stability

Cited by 3 publications

References 21 publications

Polymeric Flexible Immunosensor Based on Piezoresistive Micro-Cantilever with PEDOT/PSS Conductive Layer

Polymeric Flexible Immunosensor Based on Piezoresistive Micro-Cantilever with PEDOT/PSS Conductive Layer

A Review on Surface Stress-Based Miniaturized Piezoresistive SU-8 Polymeric Cantilever Sensors

Determination of Staphylococcus Enterotoxin B Using a Flexible Aptamer-Based Biosensor

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