2000
DOI: 10.1002/(sici)1521-4176(200001)51:1<20::aid-maco20>3.0.co;2-q
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Passivation and corrosion of microelectrode arrays

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Cited by 26 publications
(33 citation statements)
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“…Corrosion resistant leads (Ta 5/Au 300/Ta 5) nm were sputter deposited and patterned by lift-off. As suggested elsewhere (24), the sensors were passivated with a tri-layer oxide (SiO2 10/ Si3N4 10/SiO 2 10) nm that was deposited at room temperature by ion beam sputter deposition. The leads were passivated with an additional tri-layer oxide (SiO2 100/Si3N4 100/SiO2 100) nm.…”
Section: Methodsmentioning
confidence: 99%
“…Corrosion resistant leads (Ta 5/Au 300/Ta 5) nm were sputter deposited and patterned by lift-off. As suggested elsewhere (24), the sensors were passivated with a tri-layer oxide (SiO2 10/ Si3N4 10/SiO 2 10) nm that was deposited at room temperature by ion beam sputter deposition. The leads were passivated with an additional tri-layer oxide (SiO2 100/Si3N4 100/SiO2 100) nm.…”
Section: Methodsmentioning
confidence: 99%
“…Some materials commonly used in making that protective layer are SiO 2 , SiN x , SiC and various polymers. Schmitt used SiO 2 prepared by plasma enhanced chemical vapor deposition (PECVD) as protective layer for the microelectrode array and the sensor chip [2]. Kueppers researched the performance of a piezoelectric micro actuator under the protection of SiN x [3].…”
Section: Introductionmentioning
confidence: 99%
“…Compared with conventional macroelectrode (several mm in radius) [4], ultramicroelectrode possesses a lot of advantageous characteristics, including steady state currents, high mass transport, high faradaic-to-capacitive current ratio or signal-to-noise ratio, independency from hydrodynamics, low ohmic drop, etc. [1,5,6]. The combination of square wave stripping voltammetry with ultramicroelectrodes offers a lot of advantages for trace metal determination in water, including high sensitivity, independency of the convection, especially in the case of very small UMEs (<1 m) [7], and application in low ionic strength solution.…”
Section: Introductionmentioning
confidence: 99%