1983
DOI: 10.1051/rphysap:01983001809055700
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Passivation of intragrain defects by copper diffusion in p-type polycrystalline silicon

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Cited by 3 publications
(3 citation statements)
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“…The decreased intensities of the FZ samples observed at 77 K are brought about by a nonradiative recombination center (or centers) formed in the bulk. The surface passivation by Cu is not unfamiliar; it has long been known 23,24) and the increase in the minority carrier lifetime We observed X-band (9.5 GHz) electron paramagnetic resonance (EPR) spectra 25) of the aforementioned samples at room temperature to investigate the surface recombination center. We employed both FZ and Cz samples diffused with 6 Â 10 13 cm À2 of Cu before etching and those formed with the new chemical oxide after the etching.…”
Section: Origin Of the Enhancement Of The Bde-pl Intensitymentioning
confidence: 99%
“…The decreased intensities of the FZ samples observed at 77 K are brought about by a nonradiative recombination center (or centers) formed in the bulk. The surface passivation by Cu is not unfamiliar; it has long been known 23,24) and the increase in the minority carrier lifetime We observed X-band (9.5 GHz) electron paramagnetic resonance (EPR) spectra 25) of the aforementioned samples at room temperature to investigate the surface recombination center. We employed both FZ and Cz samples diffused with 6 Â 10 13 cm À2 of Cu before etching and those formed with the new chemical oxide after the etching.…”
Section: Origin Of the Enhancement Of The Bde-pl Intensitymentioning
confidence: 99%
“…This point is very interesting since other authors found a passivation effect of the GBs by Al diffusion at low. temperature (= 400 °C) [85,86]. AI-0 complexes have been suspected to be at the origin of the activation [64], The spectrum recorded in the matrix (vertical black lines, no Al signal) is superimposed to the one recorded on the GB (doted line, Al signal).…”
Section: Foreign Atom Segregationmentioning
confidence: 99%
“…Cu diffusion at 400-500 °C passivates the GBs, and it also enhances the bulk minority carrier diffusion length [86]. H implantation or diffusion is widely used to passivate not only the grain boundary but also the bulk recombination centres [22,87,88].…”
Section: Foreign Atom Segregationmentioning
confidence: 99%