Passive microsensor for binary counting of numerous threshold events

Mehner, Hannes; Schwebke, Silvan; Leopold, Steffen; Hoffmann, Martin

doi:10.1117/12.2178726

Cited by 4 publications

(3 citation statements)

References 2 publications

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“…To increment the counter, a mechanical impulse at the system's entrance, such as a mechanical shock is needed. The least significant bit (LSB) connected directly to the entrance (bit 0) is then provoked to change its state from low (0) to high (1). If, for a next impulse, the LSB changes its state again from high to low, the subsequent bit in the serial arrangement is triggered to change its state, too.…”

Section: Binary Counting Mechanismmentioning

confidence: 99%

“…To eliminate cross-sensitivity to temperature changes, the strain gauges are arranged in a quarter Wheatstone bridge. The basic resistances of each strain gauge strictly depend on the associated bit position i, which can be determined by: (1) Note that the value of the reference resistors within the Wheatstone bridge is the combined resistance value of all strain gauges that are connected in series.…”

Section: Mems-based Digital-to-analog Convertermentioning

confidence: 99%

“…In [1] we presented the basic idea of a 2-bit micromechanical binary counter realized in surface MEMS. Using a ratcheting mechanism, mechanical impulses at the system's entrance are converted into mechanically saved binary counts.…”

Section: Introductionmentioning

confidence: 99%

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A Micromechanical Binary Counter with MEMS-Based Digital-to-Analog Converter

2018

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Autonomous sensors are of interest in all cases where a continuous power source is not available or difficult to realize. Besides harvesting of electrical energy for a complex storage system, it is of interest to directly store an event in a non-electrical storage, but in a way that allows a later electrical read-out. Therefore, a miniaturized micromechanical binary counter is presented, which enables counting of threshold events, such as exceeding temperature limits or high mechanical shocks. An electro-mechanical digital-to-analog converter integrated in the binary counter is demonstrated as an option for monolithic electrical read-out of the mechanically stored information.

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Section: Binary Counting Mechanismmentioning

confidence: 99%

Section: Mems-based Digital-to-analog Convertermentioning

confidence: 99%