A new method for subcellular-sized protein patterning on a SiOx substrate is demonstrated by dip-pen nanolithography printed aldehyde-terminated alkylsilane template. The aldehyde-silane template is stable and durable; for example, subcellular scaled IgG protein array can be obtained using oneyear old aldehyde-silane template. Moreover, single cell patterning is successfully carried out by extracellular material (ECM) protein microarray and nanoarray fabricated on an aldehyde-silane template. With more than half of chance, single-or double-cells are successfully attached on fi bronectin protein nanoarrays in 21 × 21 μ m 2 (7 × 7 dot array) and 42 × 42 μ m 2 (14 × 14 dot array). The fi bronectin nanoarray with small area (21 × 21 μ m 2 ) shows the more rate of single cell attachment. Therefore, it is also demonstrated that cell patterning can be controlled by adjusting the nanostructure of ECM materials.