Patterned arrays of capped platinum nanowires with quasi-elastic mechanical response to lateral force

Abstract

In this Letter, we describe the electrodeposition of capped, micro-sized Pt nanowire arrays in ion-track etched polymer templates and measure their collective mechanical response to an external force. By using an aperture mask during the irradiation process, it was possible to restrict the creation of pores in the templates to defined areas, allowing the fabrication of small nanowire arrays in different geometries and sizes. The simultaneous and highly reliable formation of many nanowire arrays was achieved using a pulsed electrodeposition technique. After deposition, the polymer matrix was removed using a gentle, dry oxygen plasma treatment, resulting in an excellent preservation of the array nanostructure as confirmed by scanning electron microscopy. A force measuring station was set up to perform mechanical characterization series on free-standing arrays. The nanowire arrays show a high robustness and respond sensitively to the applied force, making them attractive as spring elements in miniaturized inertial sensors, for example.