2010
DOI: 10.1002/smll.200902405
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Patterned Growth of Graphene over Epitaxial Catalyst

Abstract: Rectangle- and triangle-shaped microscale graphene films are grown on epitaxial Co films deposited on single-crystal MgO substrates with (001) and (111) planes, respectively. A thin film of Co or Ni metal is epitaxially deposited on a MgO substrate by sputtering while heating the substrate. Thermal decomposition of polystyrene over this epitaxial metal film in vacuum gives rectangular or triangular pit structures whose orientation and shape are strongly dependent on the crystallographic orientation of the MgO … Show more

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Cited by 46 publications
(41 citation statements)
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“…We start the process by preparing the metal substrate (Co or Ni). Recently, we have found a way to create highly crystalline metal films after sputtering on single crystalline MgO and c-plane sapphire substrates [17,18]. Figure 1(a) illustrates the metal arrangement.…”
mentioning
confidence: 98%
See 1 more Smart Citation
“…We start the process by preparing the metal substrate (Co or Ni). Recently, we have found a way to create highly crystalline metal films after sputtering on single crystalline MgO and c-plane sapphire substrates [17,18]. Figure 1(a) illustrates the metal arrangement.…”
mentioning
confidence: 98%
“…To facilitate the transfer, a protective layer of polymethyl methacrylate (PMMA, Aldrich Chemicals) was spin coated onto the graphene-metal substrate [17,18]. The PMMA/graphene can be detached from the metal by wet-etching using FeCl 3 solution, after which it can easily be transferred onto the SiO 2 /Si substrate ( Fig.…”
mentioning
confidence: 99%
“…[6][7][8][9] It is therefore very desirable to develop effective methods for preparing large scale graphene films to enable their potential use in a broad range of applications. Recent advances in CVD synthesis of graphene have provided useful information on the nucleation and growth mechanism of graphene, [8][9][10][11][12][13][14][15][16] especially the graphene/metal (e.g. nickel, copper) systems.…”
Section: Graphenementioning
confidence: 99%
“…9 Another effort is focused on elucidating the growth mechanism of graphene in order to find ways to suppress random nucleation and induce single nucleus. However, in spite of intensive research, [10][11][12][13][14][15][16] the lack of a deep understanding in the nucleation mechanisms has become a major hurdle in achieving large-area and device quality single crystalline graphene.…”
Section: Graphenementioning
confidence: 99%
“…above the Ni grain boundaries) [15][16][17]. Therefore, a solution to this problem can be the use of single crystal nickel (sc-Ni) without GBs as a substrate to avoid inhomogeneous carbon precipitation and formation of concomitant carbon deposits [15,[18][19][20][21]. A very small lattice misfit (1.3%) exists between Ni [111] and graphene, so an epitaxial growth is anticipated and growth of graphene without GBs seems to be possible.…”
Section: Introductionmentioning
confidence: 99%