Patterning Graphene with Zigzag Edges by Self‐Aligned Anisotropic Etching

Weak localization and Raman study of anisotropically etched graphene antidots

“…18,[20][21][22][23] Only the latter allows position control of the edges via a lithographic patterning process prior to the anisotropic etching. 18,[20][21][22] Quality demonstration of edges obtained by anisotropic etching has focused on Raman spectroscopy [18][19][20][21][22] and electron transport measurements of the ambipolar field effect. [20][21][22] The interpretation of Raman spectra acquired on crystallographically defined edges is based on the edge-orientation-sensitive elastic intervalley scattering of charge carriers between the K and K 0 valleys.…”

“…18,[20][21][22] Quality demonstration of edges obtained by anisotropic etching has focused on Raman spectroscopy [18][19][20][21][22] and electron transport measurements of the ambipolar field effect. [20][21][22] The interpretation of Raman spectra acquired on crystallographically defined edges is based on the edge-orientation-sensitive elastic intervalley scattering of charge carriers between the K and K 0 valleys. Another way to probe intervalley scattering is electron transport measurements of the weak localization (WL) feature, 24 however, to this day, no experimental data have been reported on anisotropically etched graphene.…”

“…[14][15][16][17][18][19][20][21][22][23] The etching reaction can occur in a catalyzed [14][15][16][17] or in a noncatalyzed form. 18,[20][21][22][23] Only the latter allows position control of the edges via a lithographic patterning process prior to the anisotropic etching.…”

“…[14][15][16][17][18][19][20][21][22][23] The etching reaction can occur in a catalyzed [14][15][16][17] or in a noncatalyzed form. 18,[20][21][22][23] Only the latter allows position control of the edges via a lithographic patterning process prior to the anisotropic etching. 18,[20][21][22] Quality demonstration of edges obtained by anisotropic etching has focused on Raman spectroscopy [18][19][20][21][22] and electron transport measurements of the ambipolar field effect.…”

“…35 Anisotropically etched graphene edges have been studied with regard to the ratio of the D peak intensity I(D) over the G peak intensity I(G). [18][19][20][21][22] The G peak intensity measures the amount of sp 2 -hybridized carbon atoms within the illuminated sample area. Perfect zigzag edges cannot generate a D peak, and, therefore, the expected ratio IðDÞ=IðGÞ would be zero.…”