Patterning of polycrystalline diamond thin films on a variety of substrates by selectively seeding with purified ultrafine diamond powder

Diamond films have been grown on polished Si substrates seeded with nanocrystalline diamond powder colloid using hot-filament chemical vapour deposition. Instead of using the conventional gaseous carbon source, a carbonized W filament was used as the carbon source. The only feeding gas was hydrogen. Compared with those produced by traditional methods, the polycrystalline diamond grown by this new method has smaller grain size. The growth mechanism is also discussed.

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Diamond films grown on seeded substrates by hot-filament chemical vapour deposition with H₂as the only feeding gas

Liu

Wang

Chen

et al. 2002

J. Phys.: Condens. Matter

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Patterning of polycrystalline diamond thin films on a variety of substrates by selectively seeding with purified ultrafine diamond powder

Abstract: Ex situ spectroscopic ellipsometry investigation of the layered structure of polycrystalline diamond thin films grown by electron cyclotron resonance-assisted chemical vapor deposition

Cited by 1 publication

References 9 publications

Diamond films grown on seeded substrates by hot-filament chemical vapour deposition with H₂as the only feeding gas

Diamond films grown on seeded substrates by hot-filament chemical vapour deposition with H₂as the only feeding gas

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Patterning of polycrystalline diamond thin films on a variety of substrates by selectively seeding with purified ultrafine diamond powder

Abstract: Ex situ spectroscopic ellipsometry investigation of the layered structure of polycrystalline diamond thin films grown by electron cyclotron resonance-assisted chemical vapor deposition

Cited by 1 publication

References 9 publications

Diamond films grown on seeded substrates by hot-filament chemical vapour deposition with H2as the only feeding gas

Diamond films grown on seeded substrates by hot-filament chemical vapour deposition with H2as the only feeding gas

Contact Info

Product

Resources

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Diamond films grown on seeded substrates by hot-filament chemical vapour deposition with H₂as the only feeding gas

Diamond films grown on seeded substrates by hot-filament chemical vapour deposition with H₂as the only feeding gas