2004
DOI: 10.1002/adma.200306537
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Patterning of Substrates Using Surface Relief Structures on an Azobenzene‐Functionalized Polymer Film

Abstract: remaining DTT solution was removed and the wafer was rinsed with fresh 10 % EtOH/H 2 O (3 5 mL) then EtOH (5 5 mL) then dried under a nitrogen stream followed by vacuum.GMBS Attachment: The sulfhydryl functionalized porous silicon wafer was immersed in a solution of GMBS (2.0 mg, 7.1 10 ±3 mmol) in DMF (2 mL) under nitrogen. The wafer was left to react for 3 h with occasional agitation. The remaining GMBS solution was removed and the silicon wafer was rinsed with DMF (3 5 mL) followed by EtOH (3 5 mL) then dri… Show more

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Cited by 21 publications
(19 citation statements)
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“…For an azopolymer SRG to function as an etch mask, the polymer must be removed from the grating grooves to reveal the substrate. This can be achieved by partially etching the azopolymer using, for example, reactive ion etching (RIE) in oxygen plasma . Since the SRGs typically have a nearly sinusoidal surface profile, the etching time can be used as a parameter for tuning the open area of the substrate, and hence the dimensions and to some extent the geometry of the mask – note the similarity with the last example in the preceding subsection (Fig.…”
Section: Azopolymer‐based Microstructuring and Nanostructuringmentioning
confidence: 99%
See 1 more Smart Citation
“…For an azopolymer SRG to function as an etch mask, the polymer must be removed from the grating grooves to reveal the substrate. This can be achieved by partially etching the azopolymer using, for example, reactive ion etching (RIE) in oxygen plasma . Since the SRGs typically have a nearly sinusoidal surface profile, the etching time can be used as a parameter for tuning the open area of the substrate, and hence the dimensions and to some extent the geometry of the mask – note the similarity with the last example in the preceding subsection (Fig.…”
Section: Azopolymer‐based Microstructuring and Nanostructuringmentioning
confidence: 99%
“…Depending on the material to be etched, one can use either wet or dry etching. An example of applying wet etching (in a dilute hydrochloric acid with a zinc powder catalyst) to pattern indium tin oxide (ITO) is shown in Figure . AFM images of the original SRG, the mask obtained by pre‐etching the azopolymer in oxygen plasma, and the resulting patterned ITO layer are shown in Figures (a–c), respectively.…”
Section: Azopolymer‐based Microstructuring and Nanostructuringmentioning
confidence: 99%
“…Among these methods, surface anchoring is of particular interest because surface‐induced alignment of soft materials over large areas is highly feasible. Typically, it has been accomplished via rubbing of polymer films, photoalignment, ion‐beam irradiation, self‐assembly of monolayers, preparation of 2D material surfaces, and patterned of grooved surfaces via lithography …”
mentioning
confidence: 99%
“…Schematic outline of the procedure used to pattern PET layer: a) a PET sheet was spin-coated with an azobenzene polymer film; b) surface relief gratings were inscribed on the polymer film using two coherent interfering laser beams; c) the sample was etched in a plasma-etcher with oxygen until all the azobenzene polymer disappeared and then rinsed with 1,4-dioxane. 940 Yang et al layer on a glass substrate using surface-relief structures formed on azobenzene functionalized polymer film (21). The present study extends this technique to patterning flexible substrates and demonstrates the creation of intricate structures on Polyethylene terephthalate (PET).…”
Section: Resultsmentioning
confidence: 92%