1995
DOI: 10.1063/1.113545
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PbTiO3 thin films prepared by metalorganic chemical vapor deposition on LaAlO3

Abstract: High-quality PbTiO3 thin films have been grown on LaAlO3 substrates by metalorganic chemical vapor deposition, using purified metalorganic precursors titanium-iso-propoxide and tetra-ethyl-lead. The results of the cross-section scanning electron microscopy and x-ray diffraction (XRD), including theta and phi scan, show that the films are epitaxy, and a domains and c domains may align alternately in the thin films. The experiments of high-temperature XRD reveal the nature of the phase transition of grown PbTiO3… Show more

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Cited by 36 publications
(7 citation statements)
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“…The PTO powders yielded two peaks at y21.4u and 22.7u that correspond to the (001) and (100) planes, respectively. 29,30 The CFO-PTO composites yield significantly different XRD intensities for the (001) and (100) planes, which are magnified in Fig. 1(b).…”
Section: Resultsmentioning
confidence: 97%
“…The PTO powders yielded two peaks at y21.4u and 22.7u that correspond to the (001) and (100) planes, respectively. 29,30 The CFO-PTO composites yield significantly different XRD intensities for the (001) and (100) planes, which are magnified in Fig. 1(b).…”
Section: Resultsmentioning
confidence: 97%
“…Ferroelectric properties originate from the structural anisotropy, so high quality epitaxial films are required to take full advantage of the material properties and for applications in devices. Epitaxial PTO films have been grown by metalorganic chemical vapour deposition (MOCVD) [4][5][6][7][8], pulsed laser deposition (PLD) [9,10] and rf-magnetron sputtering [11]. Among various preparation methods, MOCVD has been recognized as the most promising technique due to the possibility to grow films on large area with high growth rate and good conformal step coverage.…”
Section: Introductionmentioning
confidence: 99%
“…In the literature, mainly liquid PbEt 4 and Ti(O i Pr) 4 compounds were used as precursors for MOCVD growth of PTO films by bubbling of carrier gas through containers of liquid precursors [5,6,[12][13][14][15][16]. However, some other pairs of Pb and Ti precursors have been also studied: Pb(thd) 2 (thd = 2,2,6,6-tetramethyl-3,5-heptanedionate) and Ti(O i Pr) 4 [17][18][19][20], (C 2 H 5 ) 3 PbOCH 2 C(CH 3 ) 3 and Ti(O i Pr) 4 [21], Pb(OAc) 2 and Ti(OnBu) 4 [22], PbEt 4 and Ti-npropoxyde [23] or PbEt 4 and TiCl 4 [24].…”
Section: Introductionmentioning
confidence: 99%
“…In a polycrystalline system this phenomenon causes light dispersion, increasing the optical attenuation of the film. Besides this intrinsic effect, there are other factors of major importance such as point defects and crystallographic imperfections [4][5][6][7].…”
Section: Introductionmentioning
confidence: 99%