Peculiarities of SnO2 thin film deposition by spray pyrolysis for gas sensor application

Korotcenkov, Ghenadii; Brînzari, V.; Schwank, Johannes W.; DiBattista, Michael; Vasiliev, Alexey

doi:10.1016/s0925-4005(01)00741-9

Cited by 163 publications

(72 citation statements)

References 26 publications

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“…The simulation data consists of only five points, but the observed maximum at the 573 K point is qualitatively consistent with the measured data. Other results from the literature can be cited in connection to these data: Ivashchenko et al [18] reported a conductivity maximum for SnO 2 around 560 K and Korotcenkov et al [19] show this maximum around 540 K. Response data, while they reflect the temperature functionality of conductivity but also depend on other factors, have been shown to exhibit maxima in the 550-630 K temperature range [20,21]. When conductivity measurements are made with SnO 2 in humid atmospheres, only a weak maximum is shown in the 550-575 K temperature range, owing to added complexity in the surface chemistry equilibria [22].…”

Section: Model Validationmentioning

confidence: 81%

Coupled microstructural and transport effects in n-type sensor response modeling for thin layers

Darcovich

García

Jeffrey

et al. 2008

Sensors and Actuators A: Physical

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The chemical gas sensor system of CO detection in a SnO 2 matrix was considered. A model was formulated which incorporated the coupled processes of gases diffusing into a porous ceramic and then participating in surface chemical reactions of adsorption, ionization and desorption. Microstructural properties of the sensor matrix were coupled with the diffusion and surface chemistry processes. The consequent surface chemical state served to partition bulk and grain boundary contributions to the n-type material conductance. Conductivity levels determined both with and without the presence of the target gas, CO, allowed sensor response to be determined as a function of film thickness.This simulation represents a modeling advance as it is the first to couple spatial variation of microstructural properties with diffusing gas species and the attendant surface chemistry and electroceramic properties, to predict sensor response as a function of film thickness. This will serve to be a useful design tool for ensuing materials research work towards improved sensor device development.Crown

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Section: Model Validationmentioning

confidence: 81%

Coupled microstructural and transport effects in n-type sensor response modeling for thin layers

Darcovich

García

Jeffrey

et al. 2008

Sensors and Actuators A: Physical

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“…Las capas han sido depositadas mediante pirólisis en fase aerosol a partir de soluciones acuosas de SnCl 4 ·5H 2 O [5,6,7]. La utilización de este método, permite variar fácilmente las características morfológicas de las capas controlando los distintos parámetros de depósito.…”

Section: Methodsunclassified

“…En este trabajo se estudia la evolución de las orientaciones cristalográficas de las capas crecidas por pirólisis en fase aerosol en función de la variación de la temperatura de depósito (375ºC -530ºC) [5,6]. En concreto, se estudiará la influencia de la temperatura de pirólisis en la morfología y estructura cristalográfica.…”

Section: Introductionunclassified

Evolución de la morfología y facetaje de nanoestructuras de SnO<sub>2</sub> crecidas por pirólisis en fase aerosol sobre sustratos de vidrio

Rossinyol¹,

Arbiol²,

Peiró³

et al. 2004

Bol. Soc. Esp. Ceram. Vidr.

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(Ukraine).Las características nanoestructurales de las capas finas policristalinas de SnO 2 determinan sus propiedades físicas y químicas como material sensor de gas. Se han analizado un conjunto de muestras (35nm -300nm) crecidas por pirólisis en fase aerosol sobre substratos de vidrio, estudiando la influencia de la temperatura de pirólisis (375ºC -530ºC) en la estructura cristalina de las capas. Estas muestras han sido caracterizadas mediante difracción de rayos X y microscopia electrónica de transmisión de alta resolución. Se han propuesto modelos atómicos de crecimiento, de estructura doble piramidal truncada y base rómbica, para las diferentes temperaturas de depósito.Palabras clave: SnO 2 capas finas, HRTEM, pirólisis en fase aerosol, estructura cristalina, sensor de gas semiconductor. Evolution of the morphology and faceting of SnO 2 nanostructures deposited by spray pyrolysis on glass substrate.Nanostructural characteristics of polycrystalline SnO 2 thin films determine their psychical and chemical properties as semiconductor gas sensor. Tin oxide thin films obtained by spray pyrolysis deposition on glass substrates have been studied (35nm -300nm). We have studied the influence of the pyrolysis temperature (300ºC -530ºC) on the crystallographic structure of the films. These samples have been characterised by X-ray diffraction, and high-resolution transmission electron microscopy. Some atomic models of growing have been proposed, with a double pyramidal structure and rhombic base.

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“…When the sensor is exposed to a reducing gas such as hydrogen, the hydrogen reacts with the absorbed oxygen species to form water and the electron is re-injected into the semiconductor to reduce the resistance. Several metal-oxide semiconductors have been used as gas-sensing materials such as tin oxide (SnO 2 ) (Korotcenko et al, 2001), tungsten trioxide (WO 3 ) (Kim et al, 2006), titanium oxide (TiO 2 ) (Smith et al, 1993) and zinc oxide (ZnO) (Tomchenko et al, 2003). In order to accelerate the reaction rate and increase the sensitivity, a catalyst Pd or Pt is usually deposited on the surface of the oxide semiconductor.…”

Section: Semiconductor Sensormentioning

confidence: 99%

A Study on Hydrogen Reaction Kinetics of Pt/HfO2/SiC Schottky-Diode Hydrogen Sensors

Tang¹,

Leung²,

Lai³

2012

Stoichiometry and Materials Science - When Numbers Matter

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Peculiarities of SnO2 thin film deposition by spray pyrolysis for gas sensor application

Cited by 163 publications

References 26 publications

Coupled microstructural and transport effects in n-type sensor response modeling for thin layers

Coupled microstructural and transport effects in n-type sensor response modeling for thin layers

Evolución de la morfología y facetaje de nanoestructuras de SnO<sub>2</sub> crecidas por pirólisis en fase aerosol sobre sustratos de vidrio

A Study on Hydrogen Reaction Kinetics of Pt/HfO2/SiC Schottky-Diode Hydrogen Sensors

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