2007 IEEE Asian Solid-State Circuits Conference 2007
DOI: 10.1109/asscc.2007.4425784
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Penryn: 45-nm next generation Intel® core™ 2 processor

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Cited by 34 publications
(1 citation statement)
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“…In amorphous state its dielectric constant is ~20-22, (4×) higher than that of Si3N4. Moreover, it is already introduced into microelectronics [4]. It was demonstrated that HfO2 could outperform Si3N4 in terms of trap density, which makes it a strong candidate for charge trapping layer in future CT memories [5].…”
Section: Introductionmentioning
confidence: 99%
“…In amorphous state its dielectric constant is ~20-22, (4×) higher than that of Si3N4. Moreover, it is already introduced into microelectronics [4]. It was demonstrated that HfO2 could outperform Si3N4 in terms of trap density, which makes it a strong candidate for charge trapping layer in future CT memories [5].…”
Section: Introductionmentioning
confidence: 99%