Perforated Plates of Inertial Sensors – Modeling by Effective Material Properties

Michael, S.; Frank, A.; Hölzer, G.; Lorenz, G.

doi:10.1016/j.proeng.2014.11.400

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2022

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“…For example, Rao et al proposed a capacitance model for radiofrequency (RF) switches [3], and Abdelrahman et al developed a model for the static displacement of a beam with an etch hole that considers the microstructural effect [8]. The equivalent mechanical properties of perforated structures have also been studied [9,10]. Yan and Seshia reported an air damping and elastic model of a perforated plate for out-of-plane vibration [11].…”

Section: Introductionmentioning

confidence: 99%

Analytical modeling of a MEMS beam resonator with release-etch holes

Ozaki¹,

Ohta²,

Fujiyoshi³

2022

J. Micromech. Microeng.

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In this study, a simplified reduced-order modeling scheme is developed to determine the resonant frequency of a doubly clamped beam microelectromechanical system resonator with square release-etch holes. New formulations of the effective bending and shear stiffnesses are proposed and applied to the Timoshenko beam equations. The model is validated by comparison with finite element analysis results. The results show that the model can achieve a high accuracy for a wide range of dimensions. In conclusion, the developed model is expected to contribute to reduced-order modeling of microelectromechanical systems devices.

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