2020
DOI: 10.1016/j.sna.2019.111766
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Performance and flow analysis of small piezo pump

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Cited by 26 publications
(9 citation statements)
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“…The fluid used in a pump is one of the most important aspects of the pump. In the previous study, the results of the analysis showed that the flow rate produced by the pump was inversely proportional to the dynamic viscosity [ 27 , 29 , 32 , 33 ]. In this study, a glycerin solution with a viscosity of 22.5 cP was used as the working fluid for which the concentration was 70%, corresponding to an average viscosity of the hydraulic actuator oil.…”
Section: Methodsmentioning
confidence: 99%
“…The fluid used in a pump is one of the most important aspects of the pump. In the previous study, the results of the analysis showed that the flow rate produced by the pump was inversely proportional to the dynamic viscosity [ 27 , 29 , 32 , 33 ]. In this study, a glycerin solution with a viscosity of 22.5 cP was used as the working fluid for which the concentration was 70%, corresponding to an average viscosity of the hydraulic actuator oil.…”
Section: Methodsmentioning
confidence: 99%
“…Various kinds of check valves have been proposed to improve the performance of piezoelectric pump, such as cantilever valves [18][19][20], two fixed ends valves [21][22][23], wheel valves [24][25][26], and umbrella valves [27][28][29]. With different structure and fixation, check valves show different deformation patterns under pressure and lead to different performance in piezoelectric pump.…”
Section: Introductionmentioning
confidence: 99%
“…Movable valves include overall opening valves [8], cantilever valves [9], helical linearshaped valves [10], and "E" type valves [11], and all of these can appear in valved PZT pumps. The movable valves listed above are soft structures made of rigid materials.…”
Section: Introductionmentioning
confidence: 99%