2017 Symposium on VLSI Technology 2017
DOI: 10.23919/vlsit.2017.7998144
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Performance boost of crystalline in-Ga-Zn-O material and transistor with extremely low leakage for IoT normally-off CPU application

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Cited by 16 publications
(19 citation statements)
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“…Specifically, CAAC-IGZO FETs can be monolithically formed directly on transistors using a single crystal Si channel in a single crystal Si substrate. Considering this fact, we fabricated memories and central processing units with an OSLSI/SiLSI structure in which Si transistors and OSFETs are monolithically stacked [11][12][13][14].…”
Section: Characteristics Of C-axis Aligned Crystalline Indium Gallium...mentioning
confidence: 99%
“…Specifically, CAAC-IGZO FETs can be monolithically formed directly on transistors using a single crystal Si channel in a single crystal Si substrate. Considering this fact, we fabricated memories and central processing units with an OSLSI/SiLSI structure in which Si transistors and OSFETs are monolithically stacked [11][12][13][14].…”
Section: Characteristics Of C-axis Aligned Crystalline Indium Gallium...mentioning
confidence: 99%
“…1−3 N-Channel oxide thin-film transistors (TFTs) using amorphous oxide semiconductors represented by amorphous-In−Ga−Zn−O (a-IGZO) 4,5 have been implemented as a TFT backplane in state-of-art active matrix flat panel displays (AMFPDs) such as large-sized and highresolution active matrix organic light-emitting diodes (AMO-LEDs), energy-efficient active matrix liquid crystal displays (AMLCDs) for mobile devices, and high-resolution and highframe-rate AMLCDs for middle-and large-sized TV displays. 6−8 In addition to switching devices in display applications, oxide semiconductor device technology is rapidly extending to application fields such as back-end-of-line (BEOL) transistors, 9,10 sensors, 11 memory, 12 energy harvesting, 13,14 neuromorphic computing, 15 biomedical devices, 16 and so on.…”
Section: ■ Introductionmentioning
confidence: 99%
“…Oxide semiconductors are widely accepted as promising materials to develop next-generation cost-effective, energy-efficient, and flexible electronics because devices can be fabricated on any type of large-sized substrates by a wide variety of device fabrication processes such as rf/dc sputtering and solution processing using inexpensive inorganic salt precursors. N-Channel oxide thin-film transistors (TFTs) using amorphous oxide semiconductors represented by amorphous-In–Ga–Zn–O (a-IGZO) , have been implemented as a TFT backplane in state-of-art active matrix flat panel displays (AMFPDs) such as large-sized and high-resolution active matrix organic light-emitting diodes (AMOLEDs), energy-efficient active matrix liquid crystal displays (AMLCDs) for mobile devices, and high-resolution and high-frame-rate AMLCDs for middle- and large-sized TV displays. In addition to switching devices in display applications, oxide semiconductor device technology is rapidly extending to application fields such as back-end-of-line (BEOL) transistors, , sensors, memory, energy harvesting, , neuromorphic computing, biomedical devices, and so on.…”
Section: Introductionmentioning
confidence: 99%
“…Electronics 2021, 10, 1561 2 of 11 IGZO is a material described by the Sharp and Hosono groups in 2004 [9][10][11] that has since been studied extensively as a TFT channel material for displays because of its relatively wide bandgap (~3.1 eV) and moderately high carrier mobility (10-65 cm 2 /V•s). Recently, it has been shown that the crystal structure can be easily formed in a chosen direction in the form of C-AXIS aligned crystal (CAAC)-IGZO [12][13][14]. The use of this type of IGZO as a channel material should be able to overcome the problems of leakage current interruption and temperature-dependent operating current.…”
Section: Introductionmentioning
confidence: 99%