2021
DOI: 10.1016/j.matpr.2020.07.631
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Performance evaluation of noise coupling on Germanium based TSV filled material for future IC integration technique

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Cited by 6 publications
(4 citation statements)
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“…3 However, with SiO2, Si3N4, HfO2 spacers the device exhibits IOFF lesser than nA which is feasible for scaling towards low power applications. The mathematical form of SS and DIBL is given as follows [13,14]: TGF is an important metric in determining the power required to obtain high speed with respect to gate bias.…”
Section: Results Analysismentioning
confidence: 99%
“…3 However, with SiO2, Si3N4, HfO2 spacers the device exhibits IOFF lesser than nA which is feasible for scaling towards low power applications. The mathematical form of SS and DIBL is given as follows [13,14]: TGF is an important metric in determining the power required to obtain high speed with respect to gate bias.…”
Section: Results Analysismentioning
confidence: 99%
“…To overcome the limitations faced by merely shrinking devices, various new architectures have been proposed to continue scaling like SOI MOSFET, double gate MOSFET, tri-gate, step FinFET, and gate all around (GAA) MOSFET. [1][2][3][4][5][6][7][8][9][10] Since 2011, FinFET has emerged as a 3D device chip manufacturer for mass production in electronic industry. 11 Many approaches to enhance the device performance for sub-micron technology have been made, such as channel, gate, doping, and strain engineering techniques.…”
Section: Introductionmentioning
confidence: 99%
“…Scaling decreases the ON current ( I ON ) due to various SCEs and leads to performance degradations. To overcome the limitations faced by merely shrinking devices, various new architectures have been proposed to continue scaling like SOI MOSFET, double gate MOSFET, tri‐gate, step FinFET, and gate all around (GAA) MOSFET 1–10 . Since 2011, FinFET has emerged as a 3D device chip manufacturer for mass production in electronic industry 11 .…”
Section: Introductionmentioning
confidence: 99%
“…However, with SiO2, Si3N4, HfO2 spacers the device exhibits IOFF lesser than nA which is feasible for scaling towards low power applications. The mathematical form of SS and DIBL is given as follows [13,14]: TGF is an important metric in determining the power required to obtain high speed with respect to gate bias.…”
Section: Introductionmentioning
confidence: 99%