Performance of hydrogenated amorphous silicon thin film photosensors at ultra-low light levels: towards attomole sensitivities in labon- chip biosensing applications

Santos, Denis R.; Soares, Ruben R. G.; Chu, V.

doi:10.1109/jsen.2017.2751253

Cited by 22 publications

(13 citation statements)

References 41 publications

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“…The hydrogenated amorphous silicon (a-Si:H) p-i-n photodiodes (Figure 1c) were fabricated in house as described in detail elsewhere [5]. Briefly, the structure has a bottom contact of 200 nm of aluminum, a mesa structure of 10 nm n + -a-Si:H/500 nm intrinsic a-Si:H/10 nm of p + -a-Si:H, a passivation layer of 100 nm SiNx through which a via was etch, and a top transparent electrode of 50 nm indium tin oxide (ITO).…”

Section: Fabrication Of A-si:h Photodiodesmentioning

confidence: 99%

Regenerable Bead-Based Microfluidic Device with integrated THIN-Film Photodiodes for Real Time Monitoring of DNA Detection

et al. 2018

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Nanoporous microbead-based microfluidic systems for biosensing applications allow enhanced sensitivities, while being low cost and amenable for miniaturization. The regeneration of the microfluidic biosensing system results in a further decrease in costs while the integration of on-chip signal transduction enhances portability. Here, we present a regenerable bead-based microfluidic device, with integrated thin-film photodiodes, for real-time monitoring of molecular recognition between a target DNA and complementary DNA (cDNA). High-sensitivity assay cycles could be performed without significant loss of probe DNA density and activity, demonstrating the potential for reusability, portability and reproducibility of the system.

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Section: Fabrication Of A-si:h Photodiodesmentioning

confidence: 99%

Regenerable Bead-Based Microfluidic Device with integrated THIN-Film Photodiodes for Real Time Monitoring of DNA Detection

et al. 2018

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“…All layers were patterned using a DirectWrite Lithography equipment (DWL ii Heidelberg Instruments). For a more detailed description of this process, previous work from our group can be consulted [3].…”

Section: Microfabrication Of A-si:h Photodiodesmentioning

confidence: 99%

Development of a Point-of-Care Platform for Plant Health Assessment: A Microfluidic Approach

et al. 2018

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Azelaic Acid (AzA) is a signaling molecule that plays a role in plant immune response when these are infected with pathogens, such as Botryitis cinerea, making its early detection in the field critical in the monitoring and prevention of large spread infection in crops. In this work, a microfluidic platform for the rapid detection of AzA in grapes is presented. AzA detection is achieved via an enzyme-enabled colorimetric reaction performed in a microfluidic chip coupled to a thin-film silicon photodiode. The detection of nM concentrations of AzA in buffer was achieved and initial results for AzA measurements in artificially spiked grape juice show potential for detection in realistic sample conditions.

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“…The microfluidic Lab-on-a-chip technology, still under development, meets point-of-care (POC) requirements for biomolecular analyses. The biosensors consisting of amorphous silicon (a-Si:H) p-i-n photodiode as integrated luminescence sensor in lab-on-achip devices, coupled with a microLED, have progressed rapidly over the last two decades and are still under development [1,2]. The a-Si:H p-i-n photodiode is widely used as a transducer in biosensors for biochemical analysis, where are applied pico-to nano-liters (microliters) of volumes of fluids in channels of tens to hundreds of micrometers.…”

Section: Introductionmentioning

confidence: 99%

“…The thin-film hydrogenated amorphous silicon (a-Si:H) technology [3] allows the custom fit of amorphous silicon photodiode arrays to the geometry of the flow microfluidic channel. The low-temperature (below 200°C) technology plasma-enhanced chemical-vapor deposition (PECVD) [2] or hot wire chemical-vapor deposition (HWCVD) [4] allows deposition of amorphous layers on the glass and polymer substrates, respectively, and on top of crystalline silicon integrated circuits without any damage to the circuits below [5]. At appropriate RF power, gas flows, chamber pressure, and substrate temperature in PECVD, hydrogen atoms are introduced into the thin film to passivate the silicon dangling bonds (DBs) and remove a part of (metastable) defect states from the forbidden band gap.…”

Section: Introductionmentioning

confidence: 99%

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a-Si:H p-i-n Photodiode as a Biosensor

Gradišnik¹,

Gumbarević²

2018

Photodetectors [Working Title]

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The p-in a-Si:H photodiode is a promising device as a transducer in biosensors. The native and light-induced localized state density and energy distribution in the energy gap of a-Si:H have a large effect on the photoconductivity of thin-film photodiodes. Depending on their nature, they play a crucial role in trapping and recombination processes and consequently influence the photodiode capacitance. The optical bias dependence of modulated photocurrent, OBMPC, method using the blue LED light is applied to clarify the nature and energy distribution of the energy gap density of states and their influence on the photodiode capacitance, from photodiodes transient response. It is observed that the deep defect states of the i-layer contribute to the capacitance at various bias voltages. Also, the capacitance achieves the upper limit around the built-in potential. Based on this method and obtained results, the a-Si:H p-in photodiode is used as a biosensor transducer in the detection of mammalian cell chemiluminescence.

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Performance of hydrogenated amorphous silicon thin film photosensors at ultra-low light levels: towards attomole sensitivities in labon- chip biosensing applications

Cited by 22 publications

References 41 publications

Regenerable Bead-Based Microfluidic Device with integrated THIN-Film Photodiodes for Real Time Monitoring of DNA Detection

Regenerable Bead-Based Microfluidic Device with integrated THIN-Film Photodiodes for Real Time Monitoring of DNA Detection

Development of a Point-of-Care Platform for Plant Health Assessment: A Microfluidic Approach

a-Si:H p-i-n Photodiode as a Biosensor

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