Performance of Si-Doped WO<sub>3</sub>Thin Films for Acetone Sensing Prepared by Glancing Angle DC Magnetron Sputtering

Rydosz, Artur; Szkudlarek, Aleksandra; Ziąbka, Magdalena; Domanski, K.; Maziarz, W.; Pisarkiewicz, T.

doi:10.1109/jsen.2015.2496212

Cited by 50 publications

(27 citation statements)

References 39 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Table 2 shows a summary of the information presented in this review. The author of this review started his own research program to utilize CuO in the exhaled acetone measurements, as a supplementary tool for non-invasive diabetes monitoring [59,92].…”

Section: Conclusion and Further Perspectivesmentioning

confidence: 99%

The Use of Copper Oxide Thin Films in Gas-Sensing Applications

Rydosz

2018

Coatings

Self Cite

114

View full text Add to dashboard Cite

In this work, the latest achievements in the field of copper oxide thin film gas sensors are presented and discussed. Several methods and deposition techniques are shown with their advantages and disadvantages for commercial applications. Recently, CuO thin film gas sensors have been studied to detect various compounds, such as: nitrogen oxides, carbon oxides, hydrogen sulfide, ammonia, as well as several volatile organic compounds in many different applications, e.g., agriculture. The CuO thin film gas sensors exhibited high 3-S parameters (sensitivity, selectivity, and stability). Furthermore, the possibility to function at room temperature with long-term stability was proven as well, which makes this material very attractive in gas-sensing applications, including exhaled breath analysis.

show abstract

Section: Conclusion and Further Perspectivesmentioning

confidence: 99%

The Use of Copper Oxide Thin Films in Gas-Sensing Applications

Rydosz

2018

Coatings

Self Cite

114

View full text Add to dashboard Cite

show abstract

“…The high‐angle annular dark field scanning transmission electron microscope (HAADF‐STEM) image and energy‐dispersive X‐ray (EDX) mapping image (Figure g) reveal that the Au element is homogeneously distributed in the mesoporous WO 3 . It should be noted that it is difficult to distinguish Si element from W element from EDX mapping image because all energies of the Si K and W M are very close . A series of 10 mol% SiO 2 /WO 3 with different Au‐loading amounts (designated as WO 3 /Au‐ n , n = 0, 0.2, 1.0, wherein n refers to the theoretical weight percentage of Au to WO 3 ) were synthesized by changing the amount of HAuCl 4 and all of them exhibited an ordered mesoporous structure (Figure S2, Supporting Information).…”

Section: Resultsmentioning

confidence: 99%

“…Compared with bare WO 3 and SiO 2 incorporated WO 3 without Au modification, the sensitivity toward ethanol of Au modified samples WO 3 /Au‐0.5 material was the highest, reflecting a very impressive selectivity to ethanol. It is reported that the Si doped WO 3 exhibits a high selectivity to acetone . Ethanol molecule is also a molecule with high dipole moment, and actually many reports have found that Au modified metal oxides show excellent ethanol sensing performance .…”

Section: Resultsmentioning

confidence: 99%

A General and Straightforward Route to Noble Metal‐Decorated Mesoporous Transition‐Metal Oxides with Enhanced Gas Sensing Performance

Xiao

Zou

et al. 2019

Small

View full text Add to dashboard Cite

The ORCID identification number(s) for the author(s) of this article can be found under https://doi.org/10.1002/smll.201904240. the gas sensor based on Au/WO 3 materials possess enhanced ethanol sensing performance with a good response (R air /R gas = 36-50 ppm of ethanol), high selectivity, and excellent low-concentration detection capability (down to 50 ppb) at low working temperature (200 °C). www.advancedsciencenews.com

show abstract

“…In principle, a gas sensor consists of a gas sensor substrate with a gas-sensitive layer, and package. Gas sensor substrates are usually realized in alumina [6], LTCC (low temperature cofired ceramics) [7][8][9] and silicon technology [10], and gas-sensitive layers are based on metal oxides [11][12][13][14]. Flexible gas sensor substrates are very promising in the portable exhaled breath analyzers.…”

Section: Introductionmentioning

confidence: 99%

Flexible Gas Sensor Printed on a Polymer Substrate for Sub-ppm Acetone Detection

Andrysiewicz

Krzemiński

Skarżyński

et al. 2020

Electron. Mater. Lett.

View full text Add to dashboard Cite

Gas sensors are widely used in many industrial and home applications. There is therefore continued need to develop novel gas sensor substrates which provide good mechanical and electrical stability, and good flexibility in comparison with the conventional alumina and silicon-based materials. In this paper, we present the experimental results on flexible gas sensors based on the Kapton foil and alumina substrate covered by copper oxide as a gas-sensitive layer. These sensors exhibited good mechanical stability and gas-sensing characteristics. The Kapton-based CuO gas sensors were tested under exposure to acetone in the 0.05-1.25 ppm range (150 °C, 50%RH). The results confirmed that sensors deposited on the flexible substrate such as Kapton can be used in the exhaled breath analyzers dedicated to diabetes biomarker detection or other applications for which the elastic substrate is needed. Graphic Abstract

show abstract

Performance of Si-Doped WO₃Thin Films for Acetone Sensing Prepared by Glancing Angle DC Magnetron Sputtering

Cited by 50 publications

References 39 publications

The Use of Copper Oxide Thin Films in Gas-Sensing Applications

The Use of Copper Oxide Thin Films in Gas-Sensing Applications

A General and Straightforward Route to Noble Metal‐Decorated Mesoporous Transition‐Metal Oxides with Enhanced Gas Sensing Performance

Flexible Gas Sensor Printed on a Polymer Substrate for Sub-ppm Acetone Detection

Contact Info

Product

Resources

About

Performance of Si-Doped WO3Thin Films for Acetone Sensing Prepared by Glancing Angle DC Magnetron Sputtering

Cited by 50 publications

References 39 publications

The Use of Copper Oxide Thin Films in Gas-Sensing Applications

The Use of Copper Oxide Thin Films in Gas-Sensing Applications

A General and Straightforward Route to Noble Metal‐Decorated Mesoporous Transition‐Metal Oxides with Enhanced Gas Sensing Performance

Flexible Gas Sensor Printed on a Polymer Substrate for Sub-ppm Acetone Detection

Contact Info

Product

Resources

About

Performance of Si-Doped WO₃Thin Films for Acetone Sensing Prepared by Glancing Angle DC Magnetron Sputtering