Performance of sub-atmospheric pressure hydride gas source and delivery system for MOCVD

Raynor, Mark W.; Houlding, Virginia H.; Frye, R. C.; Griffing, S; Clark, Andrew; Walterson, B.

doi:10.1016/j.jcrysgro.2003.11.015

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2004

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“…Since then, the technology has been developed and used for MOCVD [5][6][7]. Recently, a SAGE source and delivery system has been compared to a high-pressure arsine source and found to be at least equivalent from the point of view of gas purity and gas delivery requirements for MOCVD.…”

Section: Introductionmentioning

confidence: 99%

“…Cylinder depletion studies showed that the moisture concentration in the SAGE arsine decreased slightly over the cylinder lifetime, whereas moisture in arsine from the high-pressure source rose as the last third of the cylinder was consumed. In addition, AlGaAs double hetero-structures grown with SAGE and high-pressure arsine sources were characterized by secondary ion mass spectrometry and shown to be equivalent with regard to oxygen-containing impurities [7]. In this paper, we discuss the safety aspects of sub-atmospheric pressure gas technology.…”

Section: Introductionmentioning

confidence: 99%

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