Performance of Zr and Ti adhesion layers for bonding of platinum metallization to sapphire substrates

Bernhardt, G.; Silvestre, C.; LeCursi, N; Moulzolf, Scott C.; Frankel, D.; Lad, Robert J.

doi:10.1016/s0925-4005(01)00756-0

Cited by 53 publications

(23 citation statements)

References 10 publications

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“…That is, the transition may still exist but occur (as a sudden increase of the resistance) at a H 2 concentration which may be out of the upper limit of 2 % in the experiments by Kim et al [12]. Since Ti has been widely used to form a buffer (or adhesion) layer for metal films deposited on oxide substrates [13][14][15], further experiments on the effect of a Ti buffer layer on the phase transition in Pd/H system not only will be crucial for achieving H 2 sensors with a wide detection range but also can stimulate exploration on new phenomena in Ti-buffered metal systems.…”

Section: Introductionmentioning

confidence: 99%

Hydrogen responses of ultrathin Pd films and nanowire networks with a Ti buffer layer

et al. 2012

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We report on hydrogen responses of ultrathin films and nanowire networks of palladium on titanium buffered silicon substrates and filtration membranes, respectively. We found that in both systems signatures such as retarding responses and saturation of the resistance changes at high hydrogen concentrations associated with the transition from Pd/H solid solution to Pd hydride diminish with decreasing the thickness of the palladium layer from 7 to 2 nm. Our results not only reveal a new way to suppress the phase transition in Pd/H system but also provide an alternative approach to achieve fast and sensitive hydrogen sensors with a wide concentration detection range.

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Section: Introductionmentioning

confidence: 99%

Hydrogen responses of ultrathin Pd films and nanowire networks with a Ti buffer layer

et al. 2012

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“…The foil pieces also have 7 mm diameter holes cut in them to reduce stress on the diaphragm during bonding. After the diaphragm and back cavity are bonded, a 20 nm titanium layer is sputter deposited on the back side of the diaphragm to serve as an adhesion layer 29 for the 200 nm of platinum sputtered under continuous vacuum which functions as the reflective layer for the fiber-optic lever.…”

Section: Sensor Fabricationmentioning

confidence: 99%

Development of a sapphire optical pressure sensor for high-temperature applications

et al. 2014

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This paper presents the fabrication, packaging, and characterization of a sapphire optical pressure sensor for hightemperature applications. Currently available instrumentation poses significant limitations on the ability to achieve realtime, continuous measurements in high-temperature environments such as those encountered in industrial gas turbines and high-speed aircraft. The fiber-optic lever design utilizes the deflection of a circular platinum-coated sapphire diaphragm to modulate the light reflected back to a single send/receive sapphire optical fiber. The 7 mm diameter, 50 μm thick diaphragm is attached using a novel thermocompression bonding process based on spark plasma sintering technology. Bonds using platinum as an intermediate layer are achieved at a temperature of 1200°C with a hold time of 5 min. Initial characterization of the bond interface using a simple tensile test indicates a bond strength in excess of 12 MPa. Analysis of the buckled diaphragm after bonding is also presented. The packaged sensor enables continuous operation up to 900°C. Room-temperature characterization reveals a first resonance of 18.2 kHz, a flat-band sensitivity of -130 dB re 1 V/Pa (0.32 μV/Pa) from 4-20 kHz, a minimum detectable pressure of 3.8 Pa, and a linear response up to 169 dB at 1.9 kHz.

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“…Films were grown to thicknesses ranging from 10 nm to 2 μm, but unless otherwise noted, the results shown in this paper are for films with 200 nm nominal thicknesses. The Pt-coated sapphire substrates, consisting of a 50 nm Pt layer over a 10 nm Zr adhesion layer [19], were used in order to minimize charging effects during X-ray photoelectron spectroscopy (XPS) measurements. Prior to SiAlON film deposition, the substrates were cleaned with acetone, isopropyl alcohol, and DI water, and then inserted into vacuum and exposed to an Ar + plasma generated by a 150 W, electron cyclotron resonance (ECR) source operating at 10 −4 Torr.…”

Section: Contents Lists Available At Sciencedirectmentioning

confidence: 99%

Properties of amorphous SiAlON thin films grown by RF magnetron co-sputtering

Bernhardt

Krassikoff

Sturtevant

et al. 2014

Surface and Coatings Technology

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Performance of Zr and Ti adhesion layers for bonding of platinum metallization to sapphire substrates

Cited by 53 publications

References 10 publications

Hydrogen responses of ultrathin Pd films and nanowire networks with a Ti buffer layer

Hydrogen responses of ultrathin Pd films and nanowire networks with a Ti buffer layer

Development of a sapphire optical pressure sensor for high-temperature applications

Properties of amorphous SiAlON thin films grown by RF magnetron co-sputtering

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