We have investigated the ͑ p 3 3 p 3 ͒ to ͑3 3 3͒ phase transition in the a phase of Sn͞Ge(111) with variable temperature STM at temperatures between 30 and 300 K. Point defects in the Sn film stabilize localized regions of the ͑3 3 3͒ phase, where the size is characterized by a temperature dependent length (exponential attenuation). The inverse of the attenuation length is a linear function of temperature showing that the phase transition occurs at 70 K. At low temperature a density wave mediated defect-defect interaction realigns the defects to be in registry with the ͑3 3 3͒ domains.Structural phase transitions belong to a group of phenomena, which are strongly related to surface symmetry and its lowering. In many cases a prediction of the order and universality class of an anticipated phase transition can be made based solely on the knowledge of the space group of the surface or adsorbate structure [1]. This idealized picture is rarely achieved in the real world, where defects and imperfections in the surface break the symmetry. Various types of surface phase transitions have been reported in the literature [2,3], and even though an atomistic picture of the phase nucleation process has remained elusive, it is generally believed that this process involves defects and impurities [4,5]. Since the energy differences between different phases on a surface are usually very small, a slight perturbation of this energy balance, coupled with the broken symmetry induced by an imperfection, can affect not only the transition temperature but also the temperature dependence of the order parameters near the critical point. For example, consider a system with a charge density wave (CDW) instability. Electrons in the normal state will screen charged impurities, producing an attenuated CDW or Friedel oscillation near the impurity sites. The ion cores follow the local charge rearrangement and, consequently, the normal-state symmetry is broken locally and short-range CDW order develops. The electronic response to the external perturbation [6], x͑q, T ͒, depends on the temperature, leading to the intriguing proposition that defects will in general affect the evolution of long-range ordering. Tosatti and Anderson concluded that "a CDW can be regarded as unattenuated Friedel oscillations" [7].There is indeed evidence that imperfections have a strong influence on surface phase transitions. For example, the anticipated second-order phase transition on a Si(100) surface from a ͑2 3 1͒ to a c͑4 3 2͒ structure is not sharp [8]. This behavior was qualitatively reproduced by Monte Carlo simulations based on an Ising spin model [9,10]