Periodic Microstructures Fabricated by Laser Interference with Subsequent Etching

Yang, Shuman; Liu, Xueqing; Zheng, Jiahong; Lu, Yongju; Gao, Bing‐Rong

doi:10.3390/nano10071313

Cited by 10 publications

(8 citation statements)

References 44 publications

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“…In addition, the surface quality can be further improved by the polishing of the subsequent etching process. Typical surface roughness of 100 nm after laser direct ablation can be reduced to below 40 nm by wet or dry etching processing 125,126 . Third, the laser modification process based on selective laser writing overcomes the need for high-cost masks and complicated lithography procedures 127 , which make this method much simple and cost-effective than the conventional lithographic technique.…”

Section: Characteristics Of Etching-assisted Laser Micromachining Technologymentioning

confidence: 99%

Hybrid laser precision engineering of transparent hard materials: challenges, solutions and applications

2021

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Laser has been demonstrated to be a mature and versatile tool that presents great flexibility and applicability for the precision engineering of a wide range of materials over other established micromachining techniques. Past decades have witnessed its rapid development and extensive applications ranging from scientific researches to industrial manufacturing. Transparent hard materials remain several major technical challenges for conventional laser processing techniques due to their high hardness, great brittleness, and low optical absorption. A variety of hybrid laser processing technologies, such as laser-induced plasma-assisted ablation, laser-induced backside wet etching, and etching assisted laser micromachining, have been developed to overcome these barriers by introducing additional medium assistance or combining different process steps. This article reviews the basic principles and characteristics of these hybrid technologies. How these technologies are used to precisely process transparent hard materials and their recent advancements are introduced. These hybrid technologies show remarkable benefits in terms of efficiency, accuracy, and quality for the fabrication of microstructures and functional devices on the surface of or inside the transparent hard substrates, thus enabling widespread applications in the fields of microelectronics, bio-medicine, photonics, and microfluidics. A summary and outlook of the hybrid laser technologies are also highlighted.

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Section: Characteristics Of Etching-assisted Laser Micromachining Technologymentioning

confidence: 99%

Hybrid laser precision engineering of transparent hard materials: challenges, solutions and applications

2021

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“…Herein, we reported a simple strategy to prepare SMPs based SDGs by two‐beam interference method, [ 31 ] which is a simple technology that can efficiently prepare nanometer‐scale regular grating surfaced. The SMP can deform at high temperatures and maintain the deformation after cooling until the temperature rises again.…”

Section: Introductionmentioning

confidence: 99%

Smart Diffraction Gratings Based on the Shape Memory Effect

Sun

Zhang

Sun

et al. 2022

Macromol. Rapid Commun.

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The shape memory effect is the capability of a structure or a material that can be deformed into a certain temporary shape under external stimulus, and the shape will be fixed without the stimulus. The recovery process can be triggered by the same stimulus. The intelligent tunable device based on the shape memory effect has a wide range of applications in many fields. In the optical field, smart diffraction gratings can accomplish in situ optical diffractions according to requirements, meeting the high demand in the next generation of smart optical systems. However, it is essential to construct high-precision grating structures based on shape memory materials. Here, a smart diffraction grating based on UV-curable shape memory polymers (SMPs) via two-beam interference is reported, with nano-scale precision, excellent deformability and recovery ability, and adjustable spectroscopic performance. More importantly, based on the shape memory effect, grating structures that surpass the precision of the fabrication system can be obtained. The smart grating exhibits rapid deformation and recovery upon heating and long-term storage capability, which facilitates them to be applied in optics, electronics, and integrated sensing.

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“…The laser interference lithography technology is very suitable for the fabrication of periodic micro-nano structures similar to gratings. It has the advantages of high efficiency and low cost, and can achieve large-scale and rapid manufacturing [39][40][41][42][43].…”

Section: Introductionmentioning

confidence: 99%

A four-step laser interference lithography for patterning pixelated micro-polarizer array

Deng

Lü

Zhai

et al. 2022

Holography, Diffractive Optics, and Applications XII

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Pixelated micro-polarizer array is an attractive polarization imaging device because of its real-time fully detecting capability to Stokes parameters and high integration level. However, this micro-device is commonly fabricated by electron beam lithography, thus is often high-cost. Since periodic unit of this device is a 2×2 array of four types of onedimensional (1D) gratings with different orientations (0°, 45°, 90°, 135°), a low-cost grating fabrication technique, interference lithography (IL), is possible to be used to fabricate this device. In this research, a four-steps exposure patterning method of micro-polarizer array based on single Lloyd's mirror interferometer IL is developed. This interferometer is composed by two perpendicular parts: a mirror and a photoresist holder, and a 1D grating parallel with mirror can be fabricated in the exposure region on photoresist through lithography. A Cr-based mask, whose transparent pattern is a square array of square windows with 15×15 μm 2 window size and 17 μm window spacing, is introduced and clamped onto the photoresist to cut exposure region. In four exposure steps, each 15×15 μm 2 quadrant area of a polarizer array with 2 μm quadrant spacing will be exposed on photoresist, respectively. Between two exposure steps, mask and photoresist substrate need to be simultaneously horizontal rotated, to adjust the orientation of grating fabricated in next exposed quadrant on photoresist. Based on this method, we fabricated the single-state patterned micro-polarizer array, which effectively controls the cost and fabrication cycle. The experimental results show that the photoresist grating within a single window has stable structure, uniform period and good directivity.

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Periodic Microstructures Fabricated by Laser Interference with Subsequent Etching

Cited by 10 publications

References 44 publications

Hybrid laser precision engineering of transparent hard materials: challenges, solutions and applications

Hybrid laser precision engineering of transparent hard materials: challenges, solutions and applications

Smart Diffraction Gratings Based on the Shape Memory Effect

A four-step laser interference lithography for patterning pixelated micro-polarizer array

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