Permanent holographic recording in indium oxide thin films using 193 nm excimer laser radiation

Abstract

Permanent holographic recording in sputtered indium oxide (InO x ) thin films is demonstrated, using ultraviolet radiation at 193 nm emitted by an ArF excimer laser. Steady-state refractive index changes of up to 5 × 10 −3 are calculated from the measured diffraction efficiency of a HeNe laser probe beam. The recorded gratings exhibit a dynamic behaviour that relaxes to a steady-state value that depends on the oxygen partial pressure used during growth and on the recording beam intensity. The observed behaviour is explained in terms of laser-induced structural changes.

Excimer laser inscribed submicron period relief gratings in InOx films and overlaid waveguides

“…1 Furthermore, InO x has been used as an evanescent field enhancement overlayer for the realization of waveguide gratings for optical communications 2 and waveguide chemical sensors. 3 It can be deposited as a thin film using a variety of fabrication methods 4,5 producing photosensitive 6 films of controllable photoconductivity, 7 and high transparency at IR and visible wavelengths.…”

Ozone Sensing Properties of Polycrystalline Indium Oxide Films at Room Temperature

“…It shows high transparency in the visible region of the electromagnetic spectrum due to a wide band gap of approximately 3.7 eV [1] and high reflectivity in the infrared region. Due to these properties there are numerous applications of this material as transparent conductive electrode in flat panel displays, solar cells as well as coating for architectural glasses [2] and as grating material in optoelectronic devices [3]. Furthermore, indium oxide is used as semiconducting gas sensor [4,5] due to its conductivity changes when it is exposed to oxidizing gases such as ozone.…”

Synthesis and Characterization of Indium Oxide Nanoparticles

“…Clearly, the motivation for investigating the TCOs is their remarkable combination of high transparency in the visible region and high conductivity. [1][2][3] Indium oxide and the closely related indium tin oxide are two important TCOs that are useful in applications such as electrooptic modulators, low-emissivity windows, solar cells, flat-panel displays, and electrochromic mirrors and in dissipating static electricity from the windows on xerographic copiers. 4,5 The wide band gap of indium oxide (direct gap of 3.55-3.75 eV) is also remarkably close to GaN, another popular current electronic and optical material.…”