Permanent magnet micromotors on silicon substrates

Wagner, B.; Kreutzer, M.; Benecke, W.

doi:10.1109/84.232591

Cited by 64 publications

(28 citation statements)

References 20 publications

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“…T HERE has been a growing interest in the realization of bidirectionally driven microactuators [1]- [5]. Specifically, optical switches and scanners, which are essential components for optical communication and image process, usually require a stable and long-range bidirectional microactuators.…”

Section: Introductionmentioning

confidence: 99%

A bidirectional magnetic microactuator using electroplated permanent magnet arrays

Cho

Ahn

2002

J. Microelectromech. Syst.

100

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A novel bidirectional magnetic microactuator using electroplated permanent magnet arrays has been designed, fabricated and characterized in this work. To realize a bidirectional microactuator, CoNiMnP-based permanent magnet arrays have been fabricated first on a silicon cantilever beam using a new electroplating technique. In the fabricated permanent magnets, the vertical coercivity and retentivity have been achieved up to 87.6 kA/m (1100 Oe) and 190 mT (1900 G), respectively by applying magnetic field during electroplating. A prototype bidirectional magnetic microactuator has been realized by integrating an electromagnet with a silicon cantilever beam, which has permanent magnet arrays on its tip. By applying a dc current of 100 mA and altering its polarity, bidirectional motion on the tip of the cantilever beam has been successfully achieved in the deflection range of 80 m.[656]Index Terms-Bidirectional actuator, electroplated magnet, magnetic microactuator, permanent magnet array.

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Section: Introductionmentioning

confidence: 99%

A bidirectional magnetic microactuator using electroplated permanent magnet arrays

Cho

Ahn

2002

J. Microelectromech. Syst.

100

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“…In reference [1], a micromotor was designed with special emphasis on the maximization of its efficiency. The Joule efficiency obtained is about 42%, which is much higher than those reported for electromagnetic MEMS micromotors [4,5]. However, the capability of its output torque is only 3.78 nNm due to its micro dimensions (external diameter is 2.6 mm).…”

Section: Introductionmentioning

confidence: 70%

Development of an Axial Flux MEMS BLDC Micromotor with Increased Efficiency and Power Density

Ding

Liu

et al. 2015

Energies

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This paper presents a rigorous design and optimization of an axial flux microelectromechanical systems (MEMS) brushless dc (BLDC) micromotor with dual rotor improving both efficiency and power density with an external diameter of only around 10 mm. The stator is made of two layers of windings by MEMS technology. The rotor is developed by film permanent magnets assembled over the rotor yoke. The characteristics of the MEMS micromotor are analyzed and modeled through a 3-D magnetic equivalent circuit (MEC) taking the leakage flux and fringing effect into account. Such a model yields a relatively accurate prediction of the flux in the air gap, back electromotive force (EMF) and electromagnetic torque, whilst being computationally efficient. Based on 3-D MEC model the multi-objective firefly algorithm (MOFA) is developed for the optimal design of this special machine. Both 3-D finite element (FE) simulation and experiments are employed to validate the MEC model and MOFA optimization design.

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“…In most cases, bulk permanent magnets are machined and glued to the device [107]. Some instances of integration of electroplated magnets in MEMS however are available.…”

Section: Electrodeposition Of Magnetic Materials For Memsmentioning

confidence: 99%

Microelectromechanical Systems

Zangari

2010

Modern Electroplating

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Permanent magnet micromotors on silicon substrates

Cited by 64 publications

References 20 publications

A bidirectional magnetic microactuator using electroplated permanent magnet arrays

A bidirectional magnetic microactuator using electroplated permanent magnet arrays

Development of an Axial Flux MEMS BLDC Micromotor with Increased Efficiency and Power Density

Microelectromechanical Systems

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