The basic principles of high-frequency travelling wave-driven micropumps are explained. We describe the design and construction of closed pump systems which contain planar and three dimensional components fabricated by semiconductor technology. Theoretical and experimental results and further perspectives are discussed.

This paper discusses a traveling-wave-driven electrohydrodynamic micropump without moving parts. The fundamental operating principles, such as high-frequency traveling waves, a self-stabilizing temperature gradient, and increased wave number are outlined. The main new advantages of the realized pump are its ability to move conductive liquids such as water and weak electrolyte solutions, the lack of any moveable parts, and integration. A microfabricated structure demonstrating the pump operation is outlined, and quantitative results are described. Typical parameters characterizing the advantages and limitations of the pumping principle are discussed. Perspectives for optimization of the realized micropump can be seen in further miniaturization and increased number of electrodes. Possible applications are biological, medical, and chemical devices that can deliver accurately metered quantities of fluids in the nl/min and pl/min range.

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Single particles can be manipulated by applying high frequencies to ultramicro electrode arrays fabricated on planar structures. Heat production can be reduced to the extent that intense electric fields can be applied even to unmodified cell culture media. Animal cells grow normally in the high field (up to 100 kV/m) between such continuously energized multielectrodes. As with laser tweezers [1-3], this technique can capture particles and cells in field traps, generate linear movement, and permit cell cultivation. It can also produce micropatterns of pH gradients, field-cast objects, and control cell adhesion. These microtools may be combined to develop cell separators, microsensors, and controlled-biocompatibility surfaces.

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