Travelling wave-driven microfabricated electrohydrodynamic pumps for liquids

Abstract

The basic principles of high-frequency travelling wave-driven micropumps are explained. We describe the design and construction of closed pump systems which contain planar and three dimensional components fabricated by semiconductor technology. Theoretical and experimental results and further perspectives are discussed.

Thermocapillary pumping of discrete drops in microfabricated analysis devices

“…Bart et al, 1990;Fuhr et al, 1994 , a traveling electric field wave is applied with open electrodes and used to induce a bulk liquid flow with velocities on the order of several hun-Ž . dred microns per second Fuhr et al, 1994 . EHP is best suited for nonconductive or low conductivity liquids but re-Ž portedly has been adapted for electrolyte solutions Fuhr et .…”

Experimental characterization of induction electrohydrodynamics for integrated microchannel pumping

“…Further, EHD pumps have the ability to pump a variety of liquids for applications in various research fields [21]. A particular advantage of these pumps is that for traveling-wave induction EHD pumps, only minor modifications are necessary to enable pumping of different types of liquids including a change in frequency of excitation [22].…”

Fabrication and Experiment of Planar Micro Ion Drag Pump

“…With the development of micromachining technology, intensified research efforts are being directed towards micro fluid systems and micro liquid handling devices [1][2][3][4] such as drug delivery systems or micro cooling systems. An electrohydrodynamic (EHD) pump transports a fluid using the interaction between the electric field constructed by an applied voltage and the charges in the fluid.…”