Permeability Measurements of Thin Film Using a Flexible Microstrip Line-Type Probe Up To 40 GHz

Abstract

A highly sensitive probe based on the skin effect was developed to measure thin film permeability. A new **Toei Scientific Industrial Company Ltd., 1-101-60 Medeshimadai, Natori 981-1251, Japan ***Candox Systems Inc., 15-21 Oshiage-Cho, Gyoda 361-0045, Japan ****Graduate School of Engineering, Tohoku University, 6-6-05 Aramaki Aza Aoba, Aoba -ku, Sendai 980-8579, Japan A highly sensitive probe based on the skin effect was developed to measure thin film permeability. A new microstrip-line-type probe on a flexible substrate was fabricated and placed in contact with a magnetic thin film. The probe enhanced the signal-to-noise ratio and broadband measurement. The permeability of amorphous CoNbZr film

Dynamical magnetic behavior of anisotropic spinel-structured ferrite for GHz technologies

“…In conclusion, we applied two different originally developed techniques, short-circuited MSL 10 , 15 , 19 and MSL-probe 11 , 20 methods, to a Ni 0.5 Zn 0.5 Fe 2 O 4 powder/polymer composite sheet prepared from high-quality Ni 0.5 Zn 0.5 Fe 2 O 4 ceramic powder. Although the two techniques are based on different experimental setups/systems, the dynamic permeability behaviors at GHz bands are essentially consistent.…”

“…For the dynamic permeability in the GHz-frequency region, (i) short-circuited MSL 10 , 15 , 19 and (ii) MSL-probe 11 , 20 methods were employed and their results were compared. In the case of (i), originally developed sample jigs were used to produce electromagnetic radiation of suitable frequencies to irradiate the sample for the measurements.…”

“…In method (ii), a “self-developed” probe composed of a MSL on a flexible substrate was used for the measurements 11 , 20 . The MSL probe was set on the surface of sheet sample with a gap between the sample and the probe of approximately 200 μm.…”

“…Moreover, some groups measure the high-frequency permeability using commercialized-product devices, while others develop new devices aiming at more accurate measurements/analyses for the higher frequencies of the “5G era”. Thus, various combinations of experimental devices, measurement techniques, and analysis methods have been employed to evaluate the dynamic permeability, such that the measurement/analysis procedures are often strongly specific to the different research groups 6 − 11 .…”

“…In this study, we evaluate the dynamic permeability behavior of ferrites under the irradiation of an electromagnetic wave of GHz frequency through two different originally developed measurement techniques, (i) short-circuited MSL 10 , 15 , 19 , and (ii) MSL-probe 11 , 20 methods. Our aim is to provide a comprehensive understanding of the dynamical magnetic behaviors of ferrites in the GHz region.…”