2016
DOI: 10.1038/am.2016.162
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Perpendicular magnetic tunnel junction (p-MTJ) spin-valves designed with a top Co2Fe6B2 free layer and a nanoscale-thick tungsten bridging and capping layer

Abstract: Recently, p-MTJ spin-valves with top Co 2 Fe 6 B 2 free layers have been widely studied. They potentially experience crystallinity degradation in the face-centered-cubic (fcc) structure of the MgO tunneling barrier as a result of the diffusion of Ta atoms and a significant amount of Fe atoms from the Co 2 Fe 6 B 2 free and pinned layers. A new design of the p-MTJ spin-valve using a nanoscale-thick W bridging and capping layer demonstrated the absence of significant crystallinity degradation in the fcc structur… Show more

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Cited by 22 publications
(15 citation statements)
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“…To address those concerns, W was recently reported to replace Ta as spacer and bridging layers in top-pinned p-MTJ films. [32][33][34][35][36][37] A TMR of 141% after 400 °C annealing 2 and a Δ of 61 have been obtained from blank films. 34 These improvements were partially attributed to the suppression of atom diffusion and crystalline structure of the W layer, whereas the essential role of W layers in TMR enhancement has not been clearly revealed.…”
mentioning
confidence: 99%
“…To address those concerns, W was recently reported to replace Ta as spacer and bridging layers in top-pinned p-MTJ films. [32][33][34][35][36][37] A TMR of 141% after 400 °C annealing 2 and a Δ of 61 have been obtained from blank films. 34 These improvements were partially attributed to the suppression of atom diffusion and crystalline structure of the W layer, whereas the essential role of W layers in TMR enhancement has not been clearly revealed.…”
mentioning
confidence: 99%
“…Lee et al performed controlled experiments in two p‐MTJs with W and Ta heavy metal layers . Two stacks were ex situ annealed at the back‐end‐of‐line temperature of 400 °C, as shown in Figure .…”
Section: Modulation Of Hm/fm Interface For High Tmrmentioning
confidence: 99%
“…e) Dependence of the TMR ratio on both p‐MTJs with Ta and W bridging and capping layers. Reproduced with permission . Copyright 2016, Nature Publishing Group.…”
Section: Modulation Of Hm/fm Interface For High Tmrmentioning
confidence: 99%
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“…[21][22][23] Recently, experiments have investigated the influence on TMR caused by capping layers, and drawn the conclusion that a higher TMR can be achieved in MTJs with W capping layers instead of Ta. [24][25][26] However, the understanding of the essential influence on TMR caused by capping layers remains unclear, leading to difficulties in TMR optimization for MTJ nano-pillars.…”
mentioning
confidence: 99%