Aiming to introduce NbTi alloy superconducting joints for REBa2Cu3O7−δ (REBCO, RE: rare-earth element) superconducting wires, NbTi alloy thin films were deposited at room temperature on SrTiO3 (STO) (001) single-crystal substrates, which have a high lattice matching with REBCO (001). The strain, crystallinity, surface morphology, and superconducting property of the films with various thicknesses were investigated. The NbTi films grew in the orientation with (110)NbTi//(001)STO:[001]NbTi and [11–0] NbTi//[100]STO; that is, the NbTi lattices had two directions in the (110) of NbTi. The strain decreased and the crystallinity improved as the film thickness increased. The films were found to crystallize immediately at the interface between the films and substrates by cross-sectional scanning transmission electron microscopy. The flat surfaces of the films have mesh-like morphologies due to the growth of elongated NbTi grains along the [100] and [010] of the STO, reflecting the in-plane two directions of the NbTi lattices. The superconducting transition temperature of the films increased with improvement in the crystallinity of the films. The preparation of superconducting NbTi alloy thin films with sufficient crystallinity at room temperature suggested the possibility of forming the films on REBCO and the applicability of the films as superconducting joints.