2015
DOI: 10.1364/oe.23.016890
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Phase coherence length in silicon photonic platform

Abstract: We report for the first time two typical phase coherence lengths in highly confined silicon waveguides fabricated in a standard CMOS foundry's multi-project-wafer shuttle run in the 220nm silicon-on-insulator wafer with 248nm lithography. By measuring the random phase fluctuations of 800 on-chip silicon Mach-Zehnder interferometers across the wafer, we extracted, with statistical significance, the coherence lengths to be 4.17 ± 0.42 mm and 1.61 ± 0.12 mm for single mode strip waveguide and rib waveguide, respe… Show more

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Cited by 51 publications
(19 citation statements)
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“…The PNP was fabricated in a complimentary metal-oxide semiconductor (CMOS)compatible, silicon photonics process (see Methods for more detail). Waveguide edge roughness results in minor differences in path lengths between the arms of individual RBS unit cells 44 . We eliminated this problem by calibrating the PNP and programming it to implement a known unitary operation (see Supplemental Information for details on calibration).…”
Section: Programmable Nanophotonic Processormentioning
confidence: 99%
“…The PNP was fabricated in a complimentary metal-oxide semiconductor (CMOS)compatible, silicon photonics process (see Methods for more detail). Waveguide edge roughness results in minor differences in path lengths between the arms of individual RBS unit cells 44 . We eliminated this problem by calibrating the PNP and programming it to implement a known unitary operation (see Supplemental Information for details on calibration).…”
Section: Programmable Nanophotonic Processormentioning
confidence: 99%
“…Many optical functions, such as wavelength filtering, depends strongly on the matching of parameters ( e.g ., effective index or coupling coefficient) between components. As in electronics, nearby components are more likely to have matching parameters than components separated over a large distance on the chip . Also, the environment of the components should be similar, as local pattern densities can also affect device parameters .…”
Section: Challenges For An Integrated Photonic Design Flowmentioning
confidence: 99%
“…In studies focusing on optical scattering losses, the coherence lengths ξ were found to be below 100 µm [30,56]. Such short coherence lengths are not consistent with (1) optically measured wafer-scale geometric disorder [55], (2) measured millimeter-scale optical dephasing lengths [57] nor (3) with the Brillouin resonance broadening observed in silicon waveguides [18,23,58]. Therefore, we suspect the spatial correlator given in equation (7) to contain at least two terms: (1) a fast-disorder term with a coherence length of about 50 nm and (2) a slow-disorder term with a coherence length of about 50 µm.…”
Section: Appendix D: Geometric Disorder and Dephasingmentioning
confidence: 96%
“…Geometric disorder has been studied extensively in nanophotonic circuits [28,30,31,[55][56][57] to understand optical propagation losses. It has also been investigated in the context of Brillouin scattering -where it leads to broadening of the mechanical resonance [18,19,23,58].…”
Section: Appendix D: Geometric Disorder and Dephasingmentioning
confidence: 99%