2017
DOI: 10.1007/978-3-319-67459-9_3
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Phase Composition, Structure and Mechanical Properties of Carbon Coatings Doped by Carbide-Forming Metals

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“…To create composite coatings, doping with elements such as silicon [15], fluorine [16] and nitrogen [17,18], as well as metals: chromium [19] and titanium [19][20][21] is widely used. When metallic elements are included in the structure of a-C coatings, as a rule, metal carbides are formed, distributed in the volume of the amorphous carbon matrix.…”
Section: Introductionmentioning
confidence: 99%
“…To create composite coatings, doping with elements such as silicon [15], fluorine [16] and nitrogen [17,18], as well as metals: chromium [19] and titanium [19][20][21] is widely used. When metallic elements are included in the structure of a-C coatings, as a rule, metal carbides are formed, distributed in the volume of the amorphous carbon matrix.…”
Section: Introductionmentioning
confidence: 99%