Phase-conjugate holographic lithography based on micromirror array recording

Abstract

We present phase-conjugate holographic lithography with a hologram recorded by a digital micromirror device (DMD) and a telecentric lens. In our lithography system, a phase-conjugate hologram is applied instead of conventional masks or reticles to form patterns. This method has the advantage of increasing focus range, and it is applicable to the formation of patterns on fairly uneven surfaces. The hologram pattern is dynamically generated by the DMD, and its resolution is mainly determined by the demagnification of the telecentric lens. We experimentally demonstrate that our holographic lithographic system has a large focus range, and it is feasible to make a large-area hologram by stitching each pattern generated by the DMD without a falling off in resolution.

Diffraction of digital micromirror device gratings and its effect on properties of tunable fiber lasers

“…These microscopic mirrors are arranged in a rectangular array, which can be individually rotated 12°along the diagonal line, corresponding to an "on" or "off" state during the display [1]. With success of DMDs as the core components used in optical microelectronic mechanical systems and spatial light modulators, a myriad of nonprojector applications are now being enabled by generaluse DMDs, including volumetric display, holographic data storage, lithography, scientific instrumentation, and medical imaging [2][3][4][5][6].…”