“…There are three main processes that can describe the atomic transport in multilayers: (1) thermal diffusion, (2) irradiation enhanced thermal diffusion, and (3) athermal irradiation mixing (ballistic mixing). [27] During ion irradiation, the atomic mixing can be attributed to the combination action of these three processes. The process of atomic mixing can be described by Fick's law, 𝐽 = −𝐷( 𝜕𝐶 𝜕𝑥 ), where 𝐽 is the flux, 𝐷 is the diffusion coefficient, and 𝐶 is the concentration.…”