Phase Retrieval Errors Analysis of Ronchi Phase-Shifting Shearing Interferometer

Feibin, 吴飞斌 Wu; Feng, 唐锋 Tang; Xiangzhao, 王向朝 Wang; Jie, 李杰 Li; Yong, 李永 Li

doi:10.3788/aos201535.0612004

光学学报

2015

DOI: 10.3788/aos201535.0612004

|View full text |Cite

Phase Retrieval Errors Analysis of Ronchi Phase-Shifting Shearing Interferometer

吴飞斌 Wu Feibin¹,

唐锋 Tang Feng²,

王向朝 Wang Xiangzhao³

et al.

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...

Citation Types

Supporting

Mentioning

Contrasting

Year Published

2019

2024

Publication Types

Select...

Article4

Relationship

Self Cite0

Independent4

Authors

Journals

Cited by 4 publications

References 0 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

Effects of illumination non-uniformity on the double-Ronchi lateral shearing interference field

Liu¹,

Tang²,

Li³

et al. 2022

Appl. Opt.

View full text Add to dashboard Cite

Double-Ronchi shearing interferometry is a promising technique for in situ wavefront aberration measurement of the projection lens in photolithography systems. In practice, the non-uniformity of illumination is an important issue affecting the interference field, which has not been systematically researched. In this work, the interference field errors caused by non-uniform illumination distributions are analyzed utilizing the theories of scalar diffraction. The theoretical analysis has been verified by simulation and fundamental experiments. Results show that the uniformity requirements for the abrupt annular, Gaussian, and uniform random illumination distribution (RD) are 0.9434, 0.8439, and 0.2751, respectively, with a shear ratio of 5% and a relative wavefront reconstruction error of 1%. The uniformity of the three distributions is reduced to 0.6513, 0.5864, and 0.1234, respectively, with the shear ratio shrunk to 3%. When the shear ratio is less than 1%, there is no specific requirement for illumination uniformity.

show abstract

Effects of illumination non-uniformity on the double-Ronchi lateral shearing interference field

Liu¹,

Tang²,

Li³

et al. 2022

Appl. Opt.

View full text Add to dashboard Cite

show abstract

Effects and elimination of image grating defocusing on a double-Ronchi shearing interference field

Liu

Tian

et al. 2023

Appl. Opt.

View full text Add to dashboard Cite

Double-Ronchi shearing interferometry is a promising wavefront aberration measurement system for advanced lithography projection lens systems. The image grating defocusing is a key systematic error of the interferometer. However, the effects and elimination of this error have not been systematically researched. In this work, the interference field effects caused by the image grating defocusing are analyzed based on the theories of scalar diffraction, and a method to eliminate the effects is proposed. The theoretical analysis has been verified by a simulation and experiments. The results show that the error of image grating defocusing is mainly expressed as the Zernike Z4 term and Z9 term in the reconstructed wavefront, and the coefficients of Z4, and Z9, respectively, are related to NA2, NA4, and the defocus distance z. When the numerical aperture (NA) of the under-test projection lens is 0.6, 99.8384% of the errors caused by the image grating defocusing can be removed. When the NA is reduced to 0.3, 99.9854% of the errors can be removed. Additionally, when the NA is less than 0.1, almost all the errors can be eliminated.

show abstract

Method for designing phase-retrieval algorithms for Ronchi phase-shifting lateral-shearing interferometry

Han

Tang

2019

Appl. Opt.

View full text Add to dashboard Cite

scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.

Contact Info

customersupport@researchsolutions.com

10624 S. Eastern Ave., Ste. A-614

Henderson, NV 89052, USA

This site is protected by reCAPTCHA and the Google Privacy Policy and Terms of Service apply.

Blog Terms and Conditions API Terms Privacy Policy Contact Cookie Preferences Do Not Sell or Share My Personal Information

Made with 💙 for researchers

Part of the Research Solutions Family.

Phase Retrieval Errors Analysis of Ronchi Phase-Shifting Shearing Interferometer

Cited by 4 publications

References 0 publications

Effects of illumination non-uniformity on the double-Ronchi lateral shearing interference field

Effects of illumination non-uniformity on the double-Ronchi lateral shearing interference field

Effects and elimination of image grating defocusing on a double-Ronchi shearing interference field

Method for designing phase-retrieval algorithms for Ronchi phase-shifting lateral-shearing interferometry

Contact Info

Product

Resources

About