Phase Shifting Interferometry Using a Coupled Cyclic Path Interferometers

Lechuga, L. García; Toto-Arellano, Noel-Ivan; Flores-Muñoz, V. H.; Martínez-García, Amalia; Rodríguez-Zurita, Gustavo

doi:10.1007/978-3-319-28513-9_9

Cited by 2 publications

(3 citation statements)

References 11 publications

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“…In this study, the polarizer is adjusted to align at an angle of 45° to the reference axis. The RPL orientation at 0°, 45°, and 90° can be expressed as (12) (13) (14) Thus, the phase retardation Δ S1 , introduced by an inserted WO 3 thin-film sample in the S 1 track, can be obtained from Eqs. ( 12) to ( 14) as (15) The RPL orientation depends on the mirror vibration.…”

Section: Principle Of CI With the Presence Of A Samplementioning

confidence: 99%

“…Phase-shifting interferometry is generally composed of two major procedures -the phase shifting step and the phase extraction algorithm -in which the latter gives the phase information of a sample introduced in the interferometric system. The most common methods to generate phase shift are moving a mirror [1][2][3][4], displacing a diffraction grating [5], tilting a glass plate [6,7], and rotating polarizing devices such as a phase plate [8][9][10][11][12], and a polarizer [13][14][15]. The choice of the phase-shifting method for a particular application depends on available optical components coupled with its advantages deemed appropriate for the implementation.…”

Section: Introductionmentioning

confidence: 99%

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Utilization of the cyclic interferometer in polarization phase-shifting technique to determine the thickness of transparent thin-films

et al. 2020

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An alternative polarization phase-shifting technique is proposed to determine the thickness of transparent thin-films. In this study, the cyclic interferometric configuration is chosen to maintain the stability of the operation against external vibrations. The incident light is simply split by a non-polarizing beam splitter cube to generate test and reference beams, which are subsequently polarized by a polarizing beam splitter. Both linearly polarized beams are orthogonal and counter-propagating within the interferometer. A wave plate is inserted into the common paths to introduce an intrinsic phase difference between the orthogonal polarized beams. A transparent thin-film sample, placed in one of the beam tracks, modifies the output signal in terms of the phase retardation in comparison with the reference beam. The proposed phase-shifting technique uses a moving mirror with a set of “fixed” polarizing elements, namely, a quarter-wave retarder and a polarizer, to facilitate phase extraction without rotating any polarizing devices. The measured thicknesses are compared with the measurements of the same films acquired using standard equipment such as the field-emission scanning electron microscope and spectroscopic ellipsometer. Experimental results with the corresponding measured values are in good agreement with commercial measurements. The system can be reliably utilized for non-destructive thickness measurements of transparent thin-films.

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Section: Principle Of CI With the Presence Of A Samplementioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Utilization of the cyclic interferometer in polarization phase-shifting technique to determine the thickness of transparent thin-films

et al. 2020

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“…A modified Sagnac interferometer based on multiple phasestep algorithms have been realized, such as, the replication of the output with two coupling interferometric arrangements [1], or by adjusting a beam splitter (BS) in the cyclic arrangement [2]. It was reported that an analyzer at the interferometer's output must be rotated to employ this phase shift approach.…”

Section: Introductionmentioning

confidence: 99%

The comparison of multi-stepping algorithms for real-time thickness measurement of transparent thin films using polarization settings

Usman¹,

Jiraraksopakun²,

Kaewon³

et al. 2022

Laser Phys.

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This paper presents the comparison of three-, four- and five-step techniques for measuring transparent thin-film thickness of T a 2 O 5 and W O 3 deposited on BK-7 substrates. The Sagnac interferometer was modified with phase shifting approach for the determination of thin-film thickness. The input light beam was split into reference and testing beams. Before the output light reaching the balanced photodetectors, the real-time signal detection was performed to obtain the output intensities of both beams using three-, four-, and five-polarization settings of an analyzer. The thicknesses could then be efficiently translated from the measured intensities. Thicknesses from three-, four- and five-stepping algorithms were compared with ones from the conventional FE-SEM measurement, and it was discovered that the former performed better with less errors. The findings show that the phase-shifting technique using three-polarization settings is more suitable for the thickness measurement of the transparent thin film.

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Phase Shifting Interferometry Using a Coupled Cyclic Path Interferometers

Cited by 2 publications

References 11 publications

Utilization of the cyclic interferometer in polarization phase-shifting technique to determine the thickness of transparent thin-films

Utilization of the cyclic interferometer in polarization phase-shifting technique to determine the thickness of transparent thin-films

The comparison of multi-stepping algorithms for real-time thickness measurement of transparent thin films using polarization settings

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