2011
DOI: 10.1063/1.3626532
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Phonon deformation potentials of hexagonal GaN studied by biaxial stress modulation

Abstract: In this work, a biaxial stress modulation method, combining the microfabrication technique, finite element analysis and a weighted averaging process, was developed to study piezospectroscopic behavior of hexagonal GaN films, epitaxially grown by metalorganic chemical vapor deposition on c-sapphire and Si (111) substrates. Adjusting the size of patterned islands, various biaxial stress states could be obtained at the island centers, leading to abundant stress-Raman shift data. With the proposed stress modulatio… Show more

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Cited by 7 publications
(11 citation statements)
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“…The in-plane stress, i.e., the isotropic biaxial stress r biaxial , was calculated using the isotropic biaxial stress coefficient. [35][36][37] In this study, a value of À2.34 [cm À1 /GPa] was used, 36 which is the value for pure GaN and is close to the value of À2.43 proposed in Ref. 38.…”
Section: Resultsmentioning
confidence: 55%
“…The in-plane stress, i.e., the isotropic biaxial stress r biaxial , was calculated using the isotropic biaxial stress coefficient. [35][36][37] In this study, a value of À2.34 [cm À1 /GPa] was used, 36 which is the value for pure GaN and is close to the value of À2.43 proposed in Ref. 38.…”
Section: Resultsmentioning
confidence: 55%
“…For the as-grown sample, two Raman spectral peaks are observed at 567.1 and 732.1 cm −1 , which can be attributed to the E 2 (high) and A 1 (LO) phonon modes, respectively. 29,30 The initial etch to a depth of 225 nm barely shifts the Raman peaks, which are observed at 567.1 and 731.6 cm −1 respectively. These correspond to a relative in-plane strain of −0.125%.…”
Section: Resultsmentioning
confidence: 99%
“…The estimated in-plane strain relative to the as-grown sample, as calculated using the peak values of the E 2 (high) and A 1 (LO) from the Raman spectra, , are shown in Figure b. For the as-grown sample, two Raman spectral peaks are observed at 567.1 and 732.1 cm –1 , which can be attributed to the E 2 (high) and A 1 (LO) phonon modes, respectively. , The initial etch to a depth of 225 nm barely shifts the Raman peaks, which are observed at 567.1 and 731.6 cm –1 respectively. These correspond to a relative in-plane strain of −0.125%.…”
Section: Resultsmentioning
confidence: 99%
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“…, where, in case of the Raman peak w » E , H 2 0 568 rel. cm −1 is a still-debated stress-free value [12,15] and K=4.2 cm −1 GPa −1 is an experimentally measured phonon deformation potential [12,23]. The Raman scattering was excited by a 488nm wavelength laser with 10 mW power, focused through an intermediate magnification/numerical aperture×20/0.4 dry objective lens.…”
Section: Local Stress Analysis Via Confocal Raman Spectroscopymentioning
confidence: 99%