We
report a simple sol–gel process for the deposition of
poly(methyl methacrylate) (PMMA)–ZrO
2
organic–inorganic
hybrid films at low temperature and studied their properties as a
function of the molar ratios of the precursors in the hybrid sol–gel
solution, which included zirconium propoxide as the inorganic (zirconia)
source, methyl methacrylate as the organic source, and 3-trimethoxy-silyl-propyl-methacrylate
(TMSPM) as the coupling agent to enhance the compatibility between
the organic and inorganic phases. The hybrid thin-film deposition
was done on glass slide substrates by the dip-coating method. After
deposition, the films were heat-treated at 100 °C for 24 h. The
analysis of the hybrid films included Fourier transform infrared spectroscopy
to identify their chemical groups and thermogravimetric analysis to
determine the content of their organic and inorganic components. In
addition, capacitance–voltage (
C
–
V
) and current–voltage (
I
–
V
) curves in metal–insulator–metal structures,
using gold as metal contacts, were measured to find the dielectric
constant and leakage current of the PMMA–ZrO
2
hybrid
films. Finally, because of their adequate dielectric characteristics,
single hybrid layers were deposited on indium tin oxide-coated glass
substrates and were tested as gate dielectric in thin-film transistors
(TFTs), using sputtered ZnO layers as the semiconductor active channel.
We measured the output electrical response and transfer characteristics
of these hybrid dielectric gate-based devices and determined their
main electrical parameters as a function of the TMSPM content in the
hybrid dielectric gate layer. The better TFT electrical behavior presents
field effect mobility of 0.48 cm
2
/V s, low threshold voltage
of 3.3 V, and on/off current ratio of 10
5
, and it was obtained
by using PMMA–ZrO
2
with 0.3 TMSPM content as the
gate dielectric layer. The values obtained for the electrical parameters
show that PMMA–ZrO
2
hybrid films are quite suitable
for dielectric gate applications in TFTs