Photoactive Polymers with Benzocyclobutene/Silacyclobutane Dual Crosslinked Structure and Low Dielectric Constant

Abstract

Low dielectric photopatternable materials have aroused much interest owing to their potential application as alternatives of conventional photoresists. Although a number of photosensitive groups have been established to construct photopatternable materials for many years, it is still a challenge to introduce them into polymer chains via a facile and control polymerization technique, such as living free radical polymerization. In this work, on the basis of the photoactive silaycyclobutene moiety, a new monomer, 1‐methyl‐1‐(4‐vinylphenyl) silacyclobutane (1‐MVPSCB), was synthesized and demonstrated successful to conduct atom transfer radical polymerization (ATRP). Subsequently, the copolymerization of 1‐MVPSCB with 4‐vinylbenzocyclobutene (4‐VBCB) and styrene produced a kind of benzocyclobutene/silacyclobutane double‐crosslinked polymer (BS‐DCP) with controlled benzocyclobutene/silacyclobutane ratios and low polydispersity index. Owing to the UV/thermally dual crosslinked structure, BS‐DCP possesses photapatternability, high dimensional stability and low dielectric constant (2.37 at 10 MHz). These properties make BS‐DCP a potential photoresist that could be directly used as interconnected dielectrics. © 2017 Wiley Periodicals, Inc. J. Polym. Sci., Part A: Polym. Chem. 2017, 55, 1920–1928

Preparation and characterization of novel naphthyl epoxy resin containing 4-fluorobenzoyl side chains for low-k dielectrics application

“…Aer the addition of methylhexahydrophthalic anhydride (MeHHPA) as the curing agent and 2-methylimidazolate (2-MI) as the accelerator with a stoichiometric amount, the cured epoxy resins with low dielectric properties and improved thermal stabilities were obtained. Additionally, we prepared other three kinds of cured commercial epoxy resins in the same method and characterized their properties for comparison, including bisphenol A epoxy resin (BPA-EP), bisphenol F epoxy resin (BPF-EP) and 4 All other solvents were obtained commercially and used without further purication.…”

Cationic Copolymerization of Isobutylene with 4-Vinylbenzenecyclobutylene: Characteristics and Mechanisms

“…So et al synthesized a copolymer of styrene and 4-VBCB through free radical polymerization and found that BCB dramatically increases the T g of polystyene after ring opening and crosslinking [23]. Huang et al synthesized a copolymer containing BCB and silacyclobutane side groups with low dielectric constants (approximately 2.30 MHz to 10 MHz) through atom transfer radical copolymerization [24]. The thermal crosslinking of BCB can also be applied in the preparation of nanoparticles.…”

4-(2-Bromovinyl)benzocyclobutene

“…Benzocyclobutene containing polymers are of great interest in modern science because they have a variety of prominent characteristics, such as great thermal stability [1][2][3][4], low water uptake [1,5,6], high alkaline and acid stability [7,8], to complete with good dielectric properties [1,[9][10][11]. These features make such materials prospective to use as dielectric coatings and this, in turn, stimulates the searching of benzocyclobutene containing monomers and their precursors.…”