Photoactive Zr-aromatic hybrid thin films made by molecular layer deposition

Abstract

Photoactive organic–inorganic hybrid thin films for potential use in antimicrobial photodynamic therapy (PDT) were fabricated based on Zr clusters and three different aromatic dicarboxylic acid linkers using the molecular layer deposition (MLD) technique.

Depositing ALD-oxides on MLD-metalcones: enhancing initial growth through O2 plasma densification

“…5,6 In recent years, a field that has sparked special interest is the one of flexible coatings. [7][8][9] However, the inorganic nature of ALD often means that the final coating will be rigid and brittle. Some reports have shown some degree of flexibility when ALD film thicknesses are scaled down, [10][11][12] but performance is still rather limited to a few nanometres.…”