Photocatalytic Activity of Nanosized TiO₂ Thin Film Prepared by Magnetron Sputtering Method

Abstract

Nanosized TiO2 thin film on the substrate such as stainless steel plate and slide glass film were prepared by magnetron sputtering method, and these TiO2 thin films were characterized by field emission-scanning electron microscopy (FE-SEM). Photocatalytic activity for Methyl-ethyl-ketone (MEK) and acetaldehyde were measured using a closed circulating reaction system through the various ultra violet (UV) sources. From the results of SEM images, nanosized TiO2 thin film was uniformly coated on slide glass, ranging from 360 nm to 370 nm. Photocatalytic activity of MEK over TiO2 thin film on stainless steel plate did not occur by UV-A irradiation, but was efficiently decomposed by UV-B and UV-C. Also, acetaldehyde could be decomposed than MEK. The effect of sputtering conditions on their structure and photocatalytic activities were investigated in detail.

Antibacterial and ultraviolet protective neodymium-doped TiO2 film coated on polypropylene nonwoven fabric via a sputtering method

“…It is widely used in optical thin films, solar energy, and semiconductor photocatalytic antibacterial agents Antibacterial and ultraviolet protective neodymium-doped TiO 2 film coated on polypropylene nonwoven fabric via a sputtering method due to its non-toxicity and durable antibacterial properties. Coating TiO 2 film on textiles can obtain structural coloring, [9][10][11][12] electrical, 13 antibacterial, 14 ultraviolet (UV) protective, 15,16 photocatalytic, [17][18][19] and other properties. TiO 2 can be even used to improve the adhesion of nanoparticles on the fabric surface.…”

Hierarchical assembly of immobilized TiO2-based nanostructured epitaxial films on Ti Substrates for photocatalytic water decontamination and hydrogen generation

“…Electrophoretic deposition of nanopowdered TiO 2 in thin film form, electrochemical/thermal oxidation and direct anodization of Ti foil, would require metallic substrates to be employed due to reactions with the underlying supports. (Ryu et al 2003) Glass plates (Negishi et al 2007) Glass fibers (Lu et al 2006) Silica gel (Zhang et al 1994) Sand (Matthews 1991) Sol gel related methods Quartz (Fernandez et al 1995 (Kim and Anderson 1994) Electrochemical oxidation Titanium (Kim and Anderson 1994) Thermal oxidation Titanium (Camara et al 1995) Titanium alloy (Kudo et al 1990) Anodization of TiCl 3 Tin oxide coated glass, Ti, Pt and Au (Kavan et al 1993) Electrophoretic coating Stainless steel (Fernandez et al 1995) Aerosol powder coating Hollow glass beads (Nair et al 1993) Sputtering Glass (Kang et al 2011) Liquid phase disposition Glass plates (Deki et al 1996) Immobilized TiO 2 nanostructured thin films directly grown from Ti metal substrates exhibit good mechanical adhesion strength and electronic conductivity. Peng et al (2006) (Alfano et al 2000, Parent et al 1996.…”