Two depths of surface of three kinds of 10 % SiO 2 Ti-Si binary oxide powder, prepared by three kinds of sol-gel processes and annealed at higher temperature, are comparatively studied by ARXPS, SEM and HRTEM. ARXPS shows that the two depths of surface for all samples enrich in Si about 38.2-63.2 % and are the mixture of TiO x (x B 2), SiO y (y B 2), Ti-O-Si, adsorbed O-containing species and C-containing species. With increasing depth, the change of Si/Ti ratio closely relates to the original structure formed in sol-gel. The surface contents of SiO 2 and Ti-O-Si linkages increase in depth for all samples. The surface of silica-supported titania and intimately mixed silica-titania has more sub-valence Ti and Si than that of silica-coated titania, but the surface of silicacoated titania has higher concentration of Ti, O and C than that of the other two. ARXPS and SEM images consistently confirm that the surface of silica-coated titania is a porous structure. HRTEM verifies that nanocrystalline anatase TiO 2 with many crystal defects has been produced in silicacoated titania.Graphical Abstract Three nanocomposite silica-titania binary oxide powders with three different structures were synthesized by three different sol-gel processes and analyzed by ARXPS, SEM and HRTEM. As it shows that the surface of silica-coated titania is a porous structure with more O and C, the surfaces of intimately mixed silicatitania and silica-supported titania, respectively, conglomerate and sinter with more suboxide Ti and Si.