The visible light driven BiPO 4 nanocubes with sufficient surface oxygen deficiency were fabricated by a hydrothermal process and subsequently ultrasonic assistant Fe reduction process. The products were characterized by XRD, DRS, XPS, SEM and TEM which showed that the BiPO 4 had cuboid-like shape with a smooth surface and clear edges and the oxygen vacancies were succesfully introduced on the surface of the BiPO 4 nanocubes. The as prepared oxygen-deficient BiPO 4 nanocubes showed greatly enhanced visible light induced photocatalytic activity in degradation of Rhodamine B. The enhanced photocatalytic performance and expanded visible light response of BiPO 4 may be due to the introduction of surface oxygen vacancies which can generate the oxygen vacancies mid-gap states lower to the conduction band of BiPO 4 .