2006
DOI: 10.1364/ao.45.002615
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Photoconductive optically driven deformable membrane for spatial light modulator applications utilizing GaAs substrates

Abstract: The fabrication and characterization of an optically addressable deformable mirror for a spatial light modulator is described. Device operation utilizes an electrostatically driven pixellated aluminized polymeric membrane mirror supported above an optically controlled photoconductive GaAs substrate. A 5 microm thick grid of patterned photoresist supports the 2 microm thick aluminized Mylar membrane. A conductive ZnO layer is placed on the back side of the GaAs wafer. A standard Michelson interferometer is used… Show more

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Cited by 11 publications
(4 citation statements)
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“…This implementation of deformable mirrors shows numerous advantages in terms of actuation spatial frequency, simplification of the driving technology, versatility of operation, and lightweight. At the state of the art, PCDMs have been realized using crystalline inorganic photoconductors such as gallium arsenide, bismuth silicon oxide and, more recently, zinc selenide . Inorganic crystals however, suffer from limited scalability and high cost.…”
Section: Introductionmentioning
confidence: 99%
“…This implementation of deformable mirrors shows numerous advantages in terms of actuation spatial frequency, simplification of the driving technology, versatility of operation, and lightweight. At the state of the art, PCDMs have been realized using crystalline inorganic photoconductors such as gallium arsenide, bismuth silicon oxide and, more recently, zinc selenide . Inorganic crystals however, suffer from limited scalability and high cost.…”
Section: Introductionmentioning
confidence: 99%
“…In our prior work, a MEMS based all optically driven deformable mirror was designed and fabricated 11 . In this work, an optical limiter using our optically addressed deformable mirror is A bias is applied between the metalized membrane and the transparent electrode.…”
Section: Introductionmentioning
confidence: 99%
“…Illuminating the device from the back side, changes the photoconductivity across the substrate and consequently the voltage drop across the membrane and substrate, which leads to membrane deflection. The membrane deflects in a parabolic form and the deflection is proportional to the square of the applied field Several operating mechanisms of this device have been described before 11,12,13 . These include:…”
Section: Introductionmentioning
confidence: 99%
“…50 lm thick. Freestanding optical filters have numerous potential applications, including reflectors for flexible organic LEDs, [17] laminates or wraps for light recycling in displays, [16] membranes in optomechanical light modulators, [18] pellicle-type beam splitters and filters, and sails on spacecraft propelled by radiation pressure. [19] Key to these applications is the flexibility, toughness, and fracture resistance of polymers, even in micrometer-scale thin sheets.…”
mentioning
confidence: 99%