1 Introduction Zinc oxide (ZnO) is one of the most attractive materials for optoelectronic devices. This is due to its many advantages including a wide band gap energy of 3.4 eV, large exciton binding energy of 60 meV, low cost and low toxicity. The crystal structure of ZnO is wurtzite. ZnO has two polar surfaces along the c-axis, namely, the O-surface (000-1) and the Zn-surface (0001). This is because stacking sequences of atomic layers along the c-axis are asymmetric. Surface polarity effects on physical properties have been reported in the studies by photoluminescence [1], spectroscopic ellipsometry [2], scanning tunneling microscopy [3], X-ray diffraction and atomic force microscopy [4,5], transmission electron microscopy [6,7] and the Schottky diode characteristics [8]. As well, polarity controlled ZnO films have been successfully prepared by molecular-beam epitaxy [9][10][11]. Hence, it becomes more important to clarify the electric properties at polar surfaces for optoelectronic device application. In this paper, we have investigated the drift mobility of photocarriers generated at the two polar surfaces of ZnO by using the time of flight (TOF) technique.