Photoelectric inclination sensor

Kato, Hidemi; Kojima, Masahiko; Okumura, Yohzoh; Ozaki, Atsushi

doi:10.1016/0924-4247(90)85057-b

Cited by 1 publication

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“…Other examples of LED/photodiode based sensors can be found in Kato et al [11], [12]. The basic principle of the optical force sensor is shown in Fig.…”

Section: A Measurement Principle and Mechanical Designmentioning

confidence: 98%

Micro-electro-discharge machining as microsensor fabrication technology

et al. 2003

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This paper presents the design and fabrication of three miniaturized mechanical sensors to demonstrate the three-dimensional machining capabilities of micro-electro-discharge machining (EDM). The first sensor is an inertial bi-axial inclination sensor. The displacement of an inertial mass is measured optically by means of a two-dimensional position sensitive device (PSD). The machining freedom of micro-EDM makes it possible to produce both sensor and housing in one monolithic structure. The second sensor is an inertial uni-axial inclination sensor, which demonstrates the compatibility of the micro-EDM technology with the conventional photolithographic micromachining technologies. The mechanical structure of the sensor is machined by micro-EDM and the capacitive sensing part is produced by lithography. The aim of the integration is to set up a hybrid technology, which inherits the benefits of both micro-EDM and photolithography. The third miniaturized sensor is a three-component force sensor. The mechanical structure of the force sensor converts forces into displacements, which are measured optically. The mechanical structure of the force sensor is produced by wire-EDM and micro-EDM.Index Terms-Force sensor, inclination sensor, micro-electrodischarge machining (EDM).

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“…Other examples of LED/photodiode based sensors can be found in Kato et al [11], [12]. The basic principle of the optical force sensor is shown in Fig.…”

Section: A Measurement Principle and Mechanical Designmentioning

confidence: 98%