The in-plane and out-of-plane crystallographic orientations of Al 2 O 3 films grown by molecular beam epitaxy on Si͑111͒ have been determined by combining x-ray photoelectron diffraction ͑XPD͒ with transmission electron microscopy ͑TEM͒. On the one hand, polar and azimuth XPD curves for Al 2p, O 1s, and Si 2p core levels ͑recorded on a 6-nm-thick film͒ clearly indicate that Al 2 O 3 grows ͑111͒ oriented on Si͑111͒ but with two in-plane orientations: a "direct" one, i.e., ͓112͔Al 2 O 3 / /͓112͔Si͑111͒ and a "mirror" one, i.e., ͓112͔Al 2 O 3 ͑111͒ / /͓112͔Si͑111͒. On the other hand, a close inspection of the 404 Al 2 O 3 TEM diffraction spots ͑recorded on a 2-nm-thick film͒ reveals that these two in-plane orientations are slightly rotated with respect to the Si͑111͒ orientations. These two results are consistent with an oxygen plane as the interfacial plane between Al 2 O 3 ͑111͒ and Si͑111͒.