2000
DOI: 10.1016/s0040-6090(99)00955-4
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Photoluminescence characterization of non-radiative defect density on silicon surfaces and interfaces at room temperature

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Cited by 12 publications
(12 citation statements)
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“…[8,[13][14][15]. A dye-laser with an excitation wavelength of 743 nm (pulse width 0.5 ns, pulse energy 75 mJ) was used for PL.…”
Section: Characterisation Methodsmentioning
confidence: 99%
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“…[8,[13][14][15]. A dye-laser with an excitation wavelength of 743 nm (pulse width 0.5 ns, pulse energy 75 mJ) was used for PL.…”
Section: Characterisation Methodsmentioning
confidence: 99%
“…A procedure to calibrate the PL intensity with defect concentration at the SiO 2 /Si interface is described in ref. [15]. Fig.…”
Section: Influence Of Surface Pre-treatment On Recombination Loss Of mentioning
confidence: 99%
“…To control these states, sensitive methods are mandatory to measure the density of electronic states in the range from 10 13 cm -2 eV -1 to 10 10 cm -2 eV -1 , or below. One possible and easy to use method is pulsed photoluminescence (PL) spectroscopy [4,5,12,13], which can be used to determine the correlation between the electrochemical substrate treatments [4,14,15], the density of recombination active interface states [15], and the stability of different Si surface passivation in ambient air [16]. The Si surface morphology and the type of surface species are usually determined by Atomic Force Microscopy (AFM) and infrared spectroscopic ellipsometry (IRSE) or infrared Fourier-Transform spectroscopy (FTIR) in the attenuated total reflection (ATR) configuration [9,10,24].…”
Section: Experimental Techniques To Characterize Si Surface Passivationmentioning
confidence: 99%
“…The radiative interband recombination can be measured by photoluminescence (PL) techniques, where the quenching of the PL signal contains information about non-radiative recombination [5,12]. This situation has been used to examine the change in non-radiative surface recombination during surface treatments and processing of c-Si by taking into account that the bulk life time remains constant [5,12].…”
Section: In-situ / Ex-situ Photoluminescence Spectroscopymentioning
confidence: 99%
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