2008
DOI: 10.1016/j.apsusc.2007.10.099
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Wet-chemical passivation of atomically flat and structured silicon substrates for solar cell application

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Cited by 66 publications
(46 citation statements)
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“…TMAH is an anisotropic etch solution, meaning it only etches along (111) crystal plains. Therefore during the chemical etch, small silicon pyramids are formed on the surfaces, exposing (111) plains, which roughens the surfaces and helps improve the hydrogen coverage when immersed in HF 21,22 . Therefore, with an optimized surface condition, surface recombination can be inhibited when the treated silicon wafers are immersed in HF and subsequently illuminated.…”
Section: Discussionmentioning
confidence: 99%
“…TMAH is an anisotropic etch solution, meaning it only etches along (111) crystal plains. Therefore during the chemical etch, small silicon pyramids are formed on the surfaces, exposing (111) plains, which roughens the surfaces and helps improve the hydrogen coverage when immersed in HF 21,22 . Therefore, with an optimized surface condition, surface recombination can be inhibited when the treated silicon wafers are immersed in HF and subsequently illuminated.…”
Section: Discussionmentioning
confidence: 99%
“…The anisotropy etching process by changing the concentration and temperature of the alkaline solution can effectively change AF, which lead to the etch rate in the <111> direction is very low compared to the etch rate in the <100> direction. So that the surface of silicon wafers can form randomly distributed upside pyramids, called as light trapping structures [13]. The structures can effectively reduce the reflection loss from the front surface [14] and enhance the light absorption, so that improve the conversion efficiency of the solar cells.…”
Section: Resultsmentioning
confidence: 99%
“…According these results the influence of wet-chemical oxidation and oxide removal on the surface morphology of a polished Si(111) substrate can be exemplified by AFM images (2 µm × 2 µm) [33] (Fig. 2).…”
Section: Reduction Of Si Surface Micro-roughness By Wetchemical Oxidamentioning
confidence: 99%