“…This technique presents some advantages compared to UV-laser ablation such as low deposition cost, good thickness control, possibility of producing films of complex stoichiometry (such as highTc superconductors, intermetallic alloys and glasses), the absence of the dangerous gasses pervading CVD techniques [12], and low deposition temperature. This technique is a process in which a high power electron beam (15)(16)(17)(18)(19)(20) is pulsed producing the volatilization of the impacted region of the material. In this work we study the formation of silicon clusters in the film and the influence of the deposition process on the photoluminescence.…”